KUBEČKA, Martin, Adam OBRUSNÍK, Petr ZIKÁN, Mojmír JÍLEK, Juris VENCELS a Zdeněk BONAVENTURA. Predictive simulation of antenna effect in PVD processes using fluid models. SURFACE & COATINGS TECHNOLOGY. LAUSANNE: ELSEVIER SCIENCE SA, 2019, roč. 379, DEC 15 2019, s. 1-7. ISSN 0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.125045. |
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@article{1627934, author = {Kubečka, Martin and Obrusník, Adam and Zikán, Petr and Jílek, Mojmír and Vencels, Juris and Bonaventura, Zdeněk}, article_location = {LAUSANNE}, article_number = {DEC 15 2019}, doi = {http://dx.doi.org/10.1016/j.surfcoat.2019.125045}, keywords = {PVD; Antenna effect; Edge effect; Vacuum arc; Titanium nitride; Simulation; Model}, language = {eng}, issn = {0257-8972}, journal = {SURFACE & COATINGS TECHNOLOGY}, title = {Predictive simulation of antenna effect in PVD processes using fluid models}, url = {https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369}, volume = {379}, year = {2019} }
TY - JOUR ID - 1627934 AU - Kubečka, Martin - Obrusník, Adam - Zikán, Petr - Jílek, Mojmír - Vencels, Juris - Bonaventura, Zdeněk PY - 2019 TI - Predictive simulation of antenna effect in PVD processes using fluid models JF - SURFACE & COATINGS TECHNOLOGY VL - 379 IS - DEC 15 2019 SP - 1-7 EP - 1-7 PB - ELSEVIER SCIENCE SA SN - 02578972 KW - PVD KW - Antenna effect KW - Edge effect KW - Vacuum arc KW - Titanium nitride KW - Simulation KW - Model UR - https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369 L2 - https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369 N2 - We present numerical simulation of an ion-based physical vapor deposition coating process on a realistic part. The simulation is performed using a fluid model. By correlating the simulated ion flux to the surface of the coated part with experimentally measured thickness of the coating at the same conditions, it is shown that the model is capable of capturing the so-called antenna effect (edge effect). This local increase of coating thickness close to sharp edges of the part is a consequence of the plasma sheath of a negatively biased coated part. Additionally, we assess the sensitivity of the model to the boundary conditions imposed. ER -
KUBEČKA, Martin, Adam OBRUSNÍK, Petr ZIKÁN, Mojmír JÍLEK, Juris VENCELS a Zdeněk BONAVENTURA. Predictive simulation of antenna effect in PVD processes using fluid models. \textit{SURFACE \&{}amp; COATINGS TECHNOLOGY}. LAUSANNE: ELSEVIER SCIENCE SA, 2019, roč.~379, DEC 15 2019, s.~1-7. ISSN~0257-8972. Dostupné z: https://dx.doi.org/10.1016/j.surfcoat.2019.125045.
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