Fast mechanical model for probe-sample elastic deformation
estimation in scanning probe microscopy

J 2019

Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy

KLAPETEK, Petr, Anna Charvatova CAMPBELL a Vilma BURŠÍKOVÁ

Základní údaje

Originální název

Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy

Autoři

KLAPETEK, Petr (203 Česká republika, garant), Anna Charvatova CAMPBELL a Vilma BURŠÍKOVÁ (203 Česká republika, domácí)

Vydání

Ultramicroscopy, Amsterdam, North Holland, 2019, 0304-3991

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Nizozemské království

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.452

Kód RIV

RIV/00216224:14310/19:00108245

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.ultramic.2019.03.010

UT WoS

000466343800002

Klíčová slova anglicky

Scanning Probe Microscopy; Uncertainty; Elastic deformation

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 3. 4. 2020 11:06, Mgr. Marie Šípková, DiS.

Anotace

V originále

We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a massspring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe- sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.

Návaznosti

GA15-17875S, projekt VaV

Název: Lokální mikrostrukturní změny vyvolané statickou a dynamickou indentací nanostrukturovaných a nanolaminovaných povlaků

Investor: Grantová agentura ČR, Lokální mikrostrukturní změny vyvolané statickou a dynamickou indentací nanostrukturovaných a nanolaminovaných povlaků

Citovat

KLAPETEK, Petr, Anna Charvatova CAMPBELL a Vilma BURŠÍKOVÁ. Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy. Ultramicroscopy. Amsterdam: North Holland, 2019, roč. 201, JUN 2019, s. 18-27. ISSN 0304-3991. Dostupné z: https://dx.doi.org/10.1016/j.ultramic.2019.03.010.

@article{1642436,
   author = {Klapetek, Petr and Campbell, Anna Charvatova and Buršíková, Vilma},
   article_location = {Amsterdam},
   article_number = {JUN 2019},
   doi = {http://dx.doi.org/10.1016/j.ultramic.2019.03.010},
   keywords = {Scanning Probe Microscopy; Uncertainty; Elastic deformation},
   language = {eng},
   issn = {0304-3991},
   journal = {Ultramicroscopy},
   title = {Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy},
   url = {https://www.sciencedirect.com/science/article/pii/S0304399118302638},
   volume = {201},
   year = {2019}
}

TY  - JOUR
ID  - 1642436
AU  - Klapetek, Petr - Campbell, Anna Charvatova - Buršíková, Vilma
PY  - 2019
TI  - Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy
JF  - Ultramicroscopy
VL  - 201
IS  - JUN 2019
SP  - 18-27
EP  - 18-27
PB  - North Holland
SN  - 03043991
KW  - Scanning Probe Microscopy
KW  - Uncertainty
KW  - Elastic deformation
UR  - https://www.sciencedirect.com/science/article/pii/S0304399118302638
L2  - https://www.sciencedirect.com/science/article/pii/S0304399118302638
N2  - We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a massspring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe- sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.
ER  -

KLAPETEK, Petr, Anna Charvatova CAMPBELL a Vilma BURŠÍKOVÁ. Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy. \textit{Ultramicroscopy}. Amsterdam: North Holland, 2019, roč.~201, JUN 2019, s.~18-27. ISSN~0304-3991. Dostupné z: https://dx.doi.org/10.1016/j.ultramic.2019.03.010.

Podrobný výpis o publikaci