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@article{1664082, author = {Britun, Nikolay and Hnilica, Jaroslav}, article_location = {Melville (New York)}, article_number = {21}, doi = {http://dx.doi.org/10.1063/5.0006586}, keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process}, language = {eng}, issn = {0021-8979}, journal = {Journal of Applied Physics}, title = {Optical spectroscopy for sputtering process characterization}, url = {https://aip.scitation.org/doi/10.1063/5.0006586}, volume = {127}, year = {2020} }
TY - JOUR ID - 1664082 AU - Britun, Nikolay - Hnilica, Jaroslav PY - 2020 TI - Optical spectroscopy for sputtering process characterization JF - Journal of Applied Physics VL - 127 IS - 21 SP - 1-21 EP - 1-21 PB - AIP Publishing SN - 00218979 KW - magnetron sputtering KW - HiPIMS KW - spectroscopy KW - plasma diagnostics KW - sputtering process UR - https://aip.scitation.org/doi/10.1063/5.0006586 L2 - https://aip.scitation.org/doi/10.1063/5.0006586 N2 - In this Tutorial, various methods of optical spectroscopy representing certain interest for magnetron discharge characterization are overviewed. The main principles, the implementation examples, and the selected results are given for each technique, accompanied by short discussions and suggestions for further reading. Both passive and active optical methods are covered, including optical absorption and laser-based techniques. The advantages and drawbacks of each diagnostic approach are critically analyzed. Special attention is devoted to the techniques extensively used by the authors in their own work, such as line ratio methods, absorption spectroscopy, interferometry, and laser-induced fluorescence. ER -
BRITUN, Nikolay a Jaroslav HNILICA. Optical spectroscopy for sputtering process characterization. \textit{Journal of Applied Physics}. Melville (New York): AIP Publishing, 2020, roč.~127, č.~21, s.~1-21. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/5.0006586.
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