Revisiting particle dynamics in HiPIMS discharges. I. General
effects

J 2020

Revisiting particle dynamics in HiPIMS discharges. I. General effects

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS, Nikolay BRITUN et. al.

Základní údaje

Originální název

Revisiting particle dynamics in HiPIMS discharges. I. General effects

Autoři

HNILICA, Jaroslav (203 Česká republika, garant, domácí), Peter KLEIN (703 Slovensko, domácí), Petr VAŠINA (203 Česká republika, domácí), Rony SNYDERS (56 Belgie) a Nikolay BRITUN (56 Belgie)

Vydání

Journal of applied physics, American Institute of Physics, 2020, 0021-8979

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.546

Kód RIV

RIV/00216224:14310/20:00114256

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1063/5.0009378

UT WoS

000557312900001

Klíčová slova anglicky

magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 15:41, Mgr. Marie Šípková, DiS.

Anotace

V originále

A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].

Návaznosti

GA15-00863S, projekt VaV

Název: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Grantová agentura ČR, Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. I. General effects. Journal of applied physics. American Institute of Physics, 2020, roč. 128, č. 4, s. 1-14. ISSN 0021-8979. Dostupné z: https://dx.doi.org/10.1063/5.0009378.

@article{1672958,
   author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay},
   article_number = {4},
   doi = {http://dx.doi.org/10.1063/5.0009378},
   keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS},
   language = {eng},
   issn = {0021-8979},
   journal = {Journal of applied physics},
   title = {Revisiting particle dynamics in HiPIMS discharges. I. General effects},
   url = {http://aip.scitation.org/doi/10.1063/5.0009378},
   volume = {128},
   year = {2020}
}

TY  - JOUR
ID  - 1672958
AU  - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay
PY  - 2020
TI  - Revisiting particle dynamics in HiPIMS discharges. I. General effects
JF  - Journal of applied physics
VL  - 128
IS  - 4
SP  - 1-14
EP  - 1-14
PB  - American Institute of Physics
SN  - 00218979
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spectroscopy
KW  - plasma diagnostics
KW  - sputtering process
KW  - LIF
KW  - AAS
UR  - http://aip.scitation.org/doi/10.1063/5.0009378
L2  - http://aip.scitation.org/doi/10.1063/5.0009378
N2  - A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].
ER  -

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. I. General effects. \textit{Journal of applied physics}. American Institute of Physics, 2020, roč.~128, č.~4, s.~1-14. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/5.0009378.

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