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@inproceedings{1676300,
author = {Pekarek, Jan and Vrba, Radimir and Magat, Martin and Jašek, Ondřej},
address = {NEW YORK},
booktitle = {2011 34TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE 2011) - NEW TRENDS IN MICRO/NANOTECHNOLOGY},
doi = {http://dx.doi.org/10.1109/ISSE.2011.6053940},
editor = {Franz, M.; Nicolics, J.; Pietrikova, A.},
keywords = {ELECTRODES},
howpublished = {elektronická verze "online"},
language = {eng},
location = {NEW YORK},
isbn = {978-1-4577-2110-6},
pages = {515-518},
publisher = {IEEE},
title = {Preparation of Freestanding Carbon Nanotubes Using Plasma Enhanced Chemical Vapor Deposition},
url = {https://ieeexplore.ieee.org/document/6053940},
year = {2011}
}
TY - JOUR
ID - 1676300
AU - Pekarek, Jan - Vrba, Radimir - Magat, Martin - Jašek, Ondřej
PY - 2011
TI - Preparation of Freestanding Carbon Nanotubes Using Plasma Enhanced Chemical Vapor Deposition
PB - IEEE
CY - NEW YORK
SN - 9781457721106
KW - ELECTRODES
UR - https://ieeexplore.ieee.org/document/6053940
L2 - https://ieeexplore.ieee.org/document/6053940
N2 - Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 mu m dimensions. Freestanding carbon nanotubes were prepared in our experiment.
ER -
PEKAREK, Jan, Radimir VRBA, Martin MAGAT a Ondřej JAŠEK. Preparation of Freestanding Carbon Nanotubes Using Plasma Enhanced Chemical Vapor Deposition. Online. In Franz, M.; Nicolics, J.; Pietrikova, A. \textit{2011 34TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE 2011) - NEW TRENDS IN MICRO/NANOTECHNOLOGY}. NEW YORK: IEEE, 2011, s.~515-518. ISBN~978-1-4577-2110-6. Dostupné z: https://dx.doi.org/10.1109/ISSE.2011.6053940.
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