A comparative study of sioxcyhz thin films deposited in
trimethysilyl ACETATE/O2/Ar plasmas

D 2020

A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas

KELAROVÁ, Štěpánka, Roman PŘIBYL, Vojtěch HOMOLA, Lukáš ZÁBRANSKÝ, Monika STUPAVSKÁ et. al.

Základní údaje

Originální název

A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas

Autoři

KELAROVÁ, Štěpánka (203 Česká republika, garant, domácí), Roman PŘIBYL (203 Česká republika, domácí), Vojtěch HOMOLA (203 Česká republika, domácí), Lukáš ZÁBRANSKÝ (203 Česká republika, domácí), Monika STUPAVSKÁ (703 Slovensko, domácí), Martin ČERMÁK (203 Česká republika, domácí) a Vilma BURŠÍKOVÁ (203 Česká republika, domácí)

Vydání

Ostrava, 11th International Conference on Nanomaterials - Research & Application (NANOCON 2019), od s. 657-662, 6 s. 2020

Nakladatel

TANGER Ltd

Další údaje

Jazyk

angličtina

Typ výsledku

Stať ve sborníku

Obor

21000 2.10 Nano-technology

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Forma vydání

elektronická verze "online"

Odkazy

URL

Kód RIV

RIV/00216224:14310/20:00114379

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-80-87294-95-6

ISSN

DOI

http://dx.doi.org/10.37904/nanocon.2019.8643

UT WoS

000664115400113

Klíčová slova anglicky

Plasma polymers; trimethylsilyl acetate; PECVD; FTIR; microindentation; confocal microscopy; ellipsometry

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 11. 8. 2021 09:03, Mgr. Marie Šípková, DiS.

Anotace

V originále

Plasma-polymerized SiOxCyHz thin films have been playing an important role in many research studies due to their wide range of applications. These materials are perspective for industrial applications as protective coatings of metals or plastic substrates, anti-reflection coatings for solar cells, low-k dielectrics for microelectronics, water-repellent barrier films etc. Materials based on organosilicon precursors prepared by PECVD technique have become interesting for bioapplications in recent years as well due to their ability to optimize protein adsorption and cell attachment. These coatings have a great potential e.g. in BioMEMS microfabrication or treatment of biosensors and surfaces of medical implants.In the present study, low pressure RF capacitive coupled discharge in mixture of trimethylsilyl acetate (TMSA) monomer with oxygen or argon was used to create hydrophobic SiOxCyHz coatings. This study is focused primarily on research of properties of resulting coatings (chemical composition, mechanical properties, optical properties, surface wettability and surface structure) in dependence on discharge parameters. Properties of created thin films were examined in dependence on the ratio of TMSA monomer and carrier gas flow rates during the deposition process. Influence of used carrier gas (O2 or Ar) on growth of TMSA-based plasma polymers is discussed in this study as well.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

KELAROVÁ, Štěpánka, Roman PŘIBYL, Vojtěch HOMOLA, Lukáš ZÁBRANSKÝ, Monika STUPAVSKÁ, Martin ČERMÁK a Vilma BURŠÍKOVÁ. A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas. Online. In 11th International Conference on Nanomaterials - Research & Application (NANOCON 2019). Ostrava: TANGER Ltd, 2020, s. 657-662. ISBN 978-80-87294-95-6. Dostupné z: https://dx.doi.org/10.37904/nanocon.2019.8643.

@inproceedings{1686360,
   author = {Kelarová, Štěpánka and Přibyl, Roman and Homola, Vojtěch and Zábranský, Lukáš and Stupavská, Monika and Čermák, Martin and Buršíková, Vilma},
   address = {Ostrava},
   booktitle = {11th International Conference on Nanomaterials - Research & Application (NANOCON 2019)},
   doi = {http://dx.doi.org/10.37904/nanocon.2019.8643},
   keywords = {Plasma polymers; trimethylsilyl acetate; PECVD; FTIR; microindentation; confocal microscopy; ellipsometry},
   howpublished = {elektronická verze "online"},
   language = {eng},
   location = {Ostrava},
   isbn = {978-80-87294-95-6},
   pages = {657-662},
   publisher = {TANGER Ltd},
   title = {A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas},
   url = {https://doi.org/10.37904/nanocon.2019.8643},
   year = {2020}
}

TY  - JOUR
ID  - 1686360
AU  - Kelarová, Štěpánka - Přibyl, Roman - Homola, Vojtěch - Zábranský, Lukáš - Stupavská, Monika - Čermák, Martin - Buršíková, Vilma
PY  - 2020
TI  - A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas
PB  - TANGER Ltd
CY  - Ostrava
SN  - 9788087294956
KW  - Plasma polymers
KW  - trimethylsilyl acetate
KW  - PECVD
KW  - FTIR
KW  - microindentation
KW  - confocal microscopy
KW  - ellipsometry
UR  - https://doi.org/10.37904/nanocon.2019.8643
L2  - https://doi.org/10.37904/nanocon.2019.8643
N2  - Plasma-polymerized SiOxCyHz thin films have been playing an important role in many research studies due to their wide range of applications. These materials are perspective for industrial applications as protective coatings of metals or plastic substrates, anti-reflection coatings for solar cells, low-k dielectrics for microelectronics, water-repellent barrier films etc. Materials based on organosilicon precursors prepared by PECVD technique have become interesting for bioapplications in recent years as well due to their ability to optimize protein adsorption and cell attachment. These coatings have a great potential e.g. in BioMEMS microfabrication or treatment of biosensors and surfaces of medical implants.In the present study, low pressure RF capacitive coupled discharge in mixture of trimethylsilyl acetate (TMSA) monomer with oxygen or argon was used to create hydrophobic SiOxCyHz coatings. This study is focused primarily on research of properties of resulting coatings (chemical composition, mechanical properties, optical properties, surface wettability and surface structure) in dependence on discharge parameters. Properties of created thin films were examined in dependence on the ratio of TMSA monomer and carrier gas flow rates during the deposition process. Influence of used carrier gas (O2 or Ar) on growth of TMSA-based plasma polymers is discussed in this study as well.
ER  -

KELAROVÁ, Štěpánka, Roman PŘIBYL, Vojtěch HOMOLA, Lukáš ZÁBRANSKÝ, Monika STUPAVSKÁ, Martin ČERMÁK a Vilma BURŠÍKOVÁ. A comparative study of sioxcyhz thin films deposited in trimethysilyl ACETATE/O2/Ar plasmas. Online. In \textit{11th International Conference on Nanomaterials - Research \&{} Application (NANOCON 2019)}. Ostrava: TANGER Ltd, 2020, s.~657-662. ISBN~978-80-87294-95-6. Dostupné z: https://dx.doi.org/10.37904/nanocon.2019.8643.

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