Deposition of organosilicon coatings from trimethylsilyl
acetate and oxygen gases in capacitively coupled RF glow
discharge

J 2020

Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge

KELAROVÁ, Štěpánka, Vojtěch HOMOLA, Monika STUPAVSKÁ, Martin ČERMÁK, Jiří VOHÁNKA et. al.

Základní údaje

Originální název

Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge

Autoři

KELAROVÁ, Štěpánka (203 Česká republika, garant, domácí), Vojtěch HOMOLA (203 Česká republika, domácí), Monika STUPAVSKÁ (703 Slovensko, domácí), Martin ČERMÁK (203 Česká republika, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Roman PŘIBYL (203 Česká republika, domácí), Lukáš ZÁBRANSKÝ (203 Česká republika, domácí) a Vilma BURŠÍKOVÁ (203 Česká republika, domácí)

Vydání

Progress in Organic Coatings, Lausanne, Elsevier, 2020, 0300-9440

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 5.161

Kód RIV

RIV/00216224:14310/20:00114381

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.porgcoat.2020.105927

UT WoS

000582966200024

Klíčová slova anglicky

Trimethylsilyl acetate; PECVD; FTIR; XPS; Surface free energy; Ellipsometry

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 3. 12. 2020 10:46, Mgr. Marie Šípková, DiS.

Anotace

V originále

The aim of the present work was to prepare SiOxCyHz coatings in capacitively-coupled RF glow discharge from gaseous mixture of trimethylsilyl acetate (TMSAc) monomer and oxygen. The properties of deposited coatings have been investigated using several characterization methods. The presented study proves that properties of TMSAc-based thin films are significantly dependent on the monomer ratio in TMSAc/O2 mixture which varied from 25.0% to 92.3%. Using a low TMSAc ratio (high content of oxygen gas) resulted in organosilicon materials similar to SiO2 in terms of chemical composition and mechanical properties. Increasing the fraction of TMSAc in gaseous mixture led to the formation of more organic polymeric structures enriched with carbon atoms bonded in CHx chains. Values of Martens hardness decreased from 3.97 to 0.76 GPa with increasing TMSAc fraction from 25.0% to 92.3%. The degree of hydrophobicity of prepared coatings evolved in accordance with observed structural changes corresponding to applied monomer ratios. The water contact angle gradually increased from 75.0° to 95.3° with increasing TMSAc fraction. The prepared TMSAc plasma polymers became more hydrophobic with more intensive integration of hydrocarbon species into the surface structure.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

KELAROVÁ, Štěpánka, Vojtěch HOMOLA, Monika STUPAVSKÁ, Martin ČERMÁK, Jiří VOHÁNKA, Roman PŘIBYL, Lukáš ZÁBRANSKÝ a Vilma BURŠÍKOVÁ. Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge. Progress in Organic Coatings. Lausanne: Elsevier, 2020, roč. 149, December 2020, s. 1-8. ISSN 0300-9440. Dostupné z: https://dx.doi.org/10.1016/j.porgcoat.2020.105927.

@article{1686381,
   author = {Kelarová, Štěpánka and Homola, Vojtěch and Stupavská, Monika and Čermák, Martin and Vohánka, Jiří and Přibyl, Roman and Zábranský, Lukáš and Buršíková, Vilma},
   article_location = {Lausanne},
   article_number = {December 2020},
   doi = {http://dx.doi.org/10.1016/j.porgcoat.2020.105927},
   keywords = {Trimethylsilyl acetate; PECVD; FTIR; XPS; Surface free energy; Ellipsometry},
   language = {eng},
   issn = {0300-9440},
   journal = {Progress in Organic Coatings},
   title = {Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge},
   url = {https://doi.org/10.1016/j.porgcoat.2020.105927},
   volume = {149},
   year = {2020}
}

TY  - JOUR
ID  - 1686381
AU  - Kelarová, Štěpánka - Homola, Vojtěch - Stupavská, Monika - Čermák, Martin - Vohánka, Jiří - Přibyl, Roman - Zábranský, Lukáš - Buršíková, Vilma
PY  - 2020
TI  - Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge
JF  - Progress in Organic Coatings
VL  - 149
IS  - December 2020
SP  - 1-8
EP  - 1-8
PB  - Elsevier
SN  - 03009440
KW  - Trimethylsilyl acetate
KW  - PECVD
KW  - FTIR
KW  - XPS
KW  - Surface free energy
KW  - Ellipsometry
UR  - https://doi.org/10.1016/j.porgcoat.2020.105927
L2  - https://doi.org/10.1016/j.porgcoat.2020.105927
N2  - The aim of the present work was to prepare SiOxCyHz coatings in capacitively-coupled RF glow discharge from gaseous mixture of trimethylsilyl acetate (TMSAc) monomer and oxygen. The properties of deposited coatings have been investigated using several characterization methods. The presented study proves that properties of TMSAc-based thin films are significantly dependent on the monomer ratio in TMSAc/O2 mixture which varied from 25.0% to 92.3%. Using a low TMSAc ratio (high content of oxygen gas) resulted in organosilicon materials similar to SiO2 in terms of chemical composition and mechanical properties. Increasing the fraction of TMSAc in gaseous mixture led to the formation of more organic polymeric structures enriched with carbon atoms bonded in CHx chains. Values of Martens hardness decreased from 3.97 to 0.76 GPa with increasing TMSAc fraction from 25.0% to 92.3%. The degree of hydrophobicity of prepared coatings evolved in accordance with observed structural changes corresponding to applied monomer ratios. The water contact angle gradually increased from 75.0° to 95.3° with increasing TMSAc fraction. The prepared TMSAc plasma polymers became more hydrophobic with more intensive integration of hydrocarbon species into the surface structure.
ER  -

KELAROVÁ, Štěpánka, Vojtěch HOMOLA, Monika STUPAVSKÁ, Martin ČERMÁK, Jiří VOHÁNKA, Roman PŘIBYL, Lukáš ZÁBRANSKÝ a Vilma BURŠÍKOVÁ. Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge. \textit{Progress in Organic Coatings}. Lausanne: Elsevier, 2020, roč.~149, December 2020, s.~1-8. ISSN~0300-9440. Dostupné z: https://dx.doi.org/10.1016/j.porgcoat.2020.105927.

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