| VOHÁNKA, Jiří, Daniel FRANTA, Martin ČERMÁK, Vojtěch HOMOLA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials. Optics Express. Washington, D.C.: Optical Society of America, 2020, roč. 28, č. 4, s. 5492-5506. ISSN 1094-4087. Dostupné z: https://dx.doi.org/10.1364/OE.380657. |
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@article{1692056,
author = {Vohánka, Jiří and Franta, Daniel and Čermák, Martin and Homola, Vojtěch and Buršíková, Vilma and Ohlídal, Ivan},
article_location = {Washington, D.C.},
article_number = {4},
doi = {http://dx.doi.org/10.1364/OE.380657},
keywords = {optical characterization;thickness non-uniform films;ellipsometry},
language = {eng},
issn = {1094-4087},
journal = {Optics Express},
title = {Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials},
url = {https://doi.org/10.1364/OE.380657},
volume = {28},
year = {2020}
}
TY - JOUR
ID - 1692056
AU - Vohánka, Jiří - Franta, Daniel - Čermák, Martin - Homola, Vojtěch - Buršíková, Vilma - Ohlídal, Ivan
PY - 2020
TI - Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials
JF - Optics Express
VL - 28
IS - 4
SP - 5492-5506
EP - 5492-5506
PB - Optical Society of America
SN - 10944087
KW - optical characterization;thickness non-uniform films;ellipsometry
UR - https://doi.org/10.1364/OE.380657
L2 - https://doi.org/10.1364/OE.380657
N2 - A common approach to non-uniformity is to assume that the local thicknesses inside the light spot are distributed according to a certain distribution, such as the uniform distribution or the Wigner semicircle distribution. A model considered in this work uses a different approach in which the local thicknesses are given by a polynomial in the coordinates x and y along the surface of the film. An approach using the Gaussian quadrature is very efficient for including the influence of the non-uniformity on the measured ellipsometric quantities. However, the nodes and weights for the Gaussian quadrature must be calculated numerically if the non-uniformity is parameterized by the second or higher degree polynomial. A method for calculating these nodes and weights which is both efficient and numerically stable is presented. The presented method with a model using a second-degree polynomial is demonstrated on the sample of highly non-uniform polymer-like thin film characterized using variable-angle spectroscopic ellipsometry. The results are compared with those obtained using a model assuming the Wigner semicircle distribution.
ER -
VOHÁNKA, Jiří, Daniel FRANTA, Martin ČERMÁK, Vojtěch HOMOLA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials. \textit{Optics Express}. Washington, D.C.: Optical Society of America, 2020, roč.~28, č.~4, s.~5492-5506. ISSN~1094-4087. Dostupné z: https://dx.doi.org/10.1364/OE.380657.
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