In situ grazing-incidence x-ray scattering study of
pulsed-laser deposition of Pt layers

J 2020

In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers

HOLÝ, Václav, Sondes Trabelsi BAUER, Adriana RODRIGUES, Lukáš HORÁK, Xiaowei JIN et. al.

Basic information

Original name

In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers

Authors

HOLÝ, Václav (203 Czech Republic, guarantor, belonging to the institution), Sondes Trabelsi BAUER, Adriana RODRIGUES, Lukáš HORÁK, Xiaowei JIN, Reinhard SCHNEIDER and G. T. BAUMBACH

Edition

Physical Review B, College PK, The American Physical Society, 2020, 2469-9950

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 4.036

RIV identification code

RIV/00216224:14740/20:00117386

Organization unit

Central European Institute of Technology

DOI

http://dx.doi.org/10.1103/PhysRevB.102.125435

UT WoS

000573183400009

Keywords in English

Growth; Island; 2-dimensional systems; thin films; film deposition; small-angle x-ray scattering

Abstract

V originále

We present a methodical study of grazing-incidence small-angle x-ray scattering performed in situ during pulsed-laser deposition of Pt on sapphire substrates. From measured two-dimensional intensity distributions in reciprocal space we calculated horizontal and vertical intensity projections and compare them to numerical simulations. The structure of the Pt layers was described using a simple Monte-Carlo model and the Ornstein-Zernicke theory with the Percus-Yevick approximation, and the scattering process was simulated using distorted-wave Born approximation. The validity of the structure models as well as the effect of the indirect scattering processes are discussed. From the comparison of the measured and simulated data we determined the lateral and vertical sizes of surface islands, the surface coverage, the island coalescence, as well as the thickness of the wetting layer at the substrate surface. We studied the time evolution of these parameters and their dependence on the substrate temperature.

Citovat

HOLÝ, Václav, Sondes Trabelsi BAUER, Adriana RODRIGUES, Lukáš HORÁK, Xiaowei JIN, Reinhard SCHNEIDER and G. T. BAUMBACH. In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers. Physical Review B. College PK: The American Physical Society, 2020, vol. 102, No 12, p. 1-15. ISSN 2469-9950. Available from: https://dx.doi.org/10.1103/PhysRevB.102.125435.

@article{1710916,
   author = {Holý, Václav and Bauer, Sondes Trabelsi and Rodrigues, Adriana and Horák, Lukáš and Jin, Xiaowei and Schneider, Reinhard and Baumbach, G. T.},
   article_location = {College PK},
   article_number = {12},
   doi = {http://dx.doi.org/10.1103/PhysRevB.102.125435},
   keywords = {Growth; Island; 2-dimensional systems; thin films; film deposition; small-angle x-ray scattering},
   language = {eng},
   issn = {2469-9950},
   journal = {Physical Review B},
   title = {In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers},
   url = {https://doi.org/10.1103/PhysRevB.102.125435},
   volume = {102},
   year = {2020}
}

TY  - JOUR
ID  - 1710916
AU  - Holý, Václav - Bauer, Sondes Trabelsi - Rodrigues, Adriana - Horák, Lukáš - Jin, Xiaowei - Schneider, Reinhard - Baumbach, G. T.
PY  - 2020
TI  - In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers
JF  - Physical Review B
VL  - 102
IS  - 12
SP  - 1-15
EP  - 1-15
PB  - The American Physical Society
SN  - 24699950
KW  - Growth
KW  - Island
KW  - 2-dimensional systems
KW  - thin films
KW  - film deposition
KW  - small-angle x-ray scattering
UR  - https://doi.org/10.1103/PhysRevB.102.125435
L2  - https://doi.org/10.1103/PhysRevB.102.125435
N2  - We present a methodical study of grazing-incidence small-angle x-ray scattering performed in situ during pulsed-laser deposition of Pt on sapphire substrates. From measured two-dimensional intensity distributions in reciprocal space we calculated horizontal and vertical intensity projections and compare them to numerical simulations. The structure of the Pt layers was described using a simple Monte-Carlo model and the Ornstein-Zernicke theory with the Percus-Yevick approximation, and the scattering process was simulated using distorted-wave Born approximation. The validity of the structure models as well as the effect of the indirect scattering processes are discussed. From the comparison of the measured and simulated data we determined the lateral and vertical sizes of surface islands, the surface coverage, the island coalescence, as well as the thickness of the wetting layer at the substrate surface. We studied the time evolution of these parameters and their dependence on the substrate temperature.
ER  -

HOLÝ, Václav, Sondes Trabelsi BAUER, Adriana RODRIGUES, Lukáš HORÁK, Xiaowei JIN, Reinhard SCHNEIDER and G. T. BAUMBACH. In situ grazing-incidence x-ray scattering study of pulsed-laser deposition of Pt layers. \textit{Physical Review B}. College PK: The American Physical Society, 2020, vol.~102, No~12, p.~1-15. ISSN~2469-9950. Available from: https://dx.doi.org/10.1103/PhysRevB.102.125435.

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