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@inproceedings{1730440,
author = {Kubečka, Martin and Toman, Jozef and Šnírer, Miroslav and Jašek, Ondřej and Kudrle, Vít and Jurmanová, Jana},
address = {Ostrava},
booktitle = {NANOCON Conference Proceedings - International Conference on Nanomaterials},
doi = {http://dx.doi.org/10.37904/nanocon.2019.8455},
edition = {1},
keywords = {Graphene; microwave plasma; temperature; dielectric substrate},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-95-6},
pages = {80-84},
publisher = {TANGER Ltd.},
title = {The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment},
url = {https://www.confer.cz/nanocon/2019},
year = {2020}
}
TY - JOUR
ID - 1730440
AU - Kubečka, Martin - Toman, Jozef - Šnírer, Miroslav - Jašek, Ondřej - Kudrle, Vít - Jurmanová, Jana
PY - 2020
TI - The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment
PB - TANGER Ltd.
CY - Ostrava
SN - 9788087294956
KW - Graphene
KW - microwave plasma
KW - temperature
KW - dielectric substrate
UR - https://www.confer.cz/nanocon/2019
N2 - The relation between plasma temperature and properties of graphene nanosheet layer deposited on Si/SiO2 substrate by decomposition of ethanol in microwave plasma torch discharge at atmospheric pressure was investigated in dependence on delivered microwave power and gas flow rates. Plasma modelling was carried out using COMSOL Multiphysics software with delivered microwave power, gas flow rates and experimental reactor geometry as input parameters. Results of the heat flow and fluid dynamics modelling were compared with substrate temperature measured by thermocouple integrated in quartz tube substrate holder. The graphene nanosheets layer was characterized by SEM, Raman spectroscopy and 4-point probe method. The layers were severals tens of micrometre thick and their sheet resistance varied from 2 to 40 kiloohm/sq. The properties of individual graphene nanosheets, 2D/G and D/G Raman band ratio, as well as the sheet resistance of their conductive network were correlated with the increase of plasma temperature with increasing microwave power. The substrate temperature increased linearly with delivered microwave power and the layer sheet resistance was decreasing with increasing microwave power and saturated at 2 kiloohm/sq and D/G ratio of 0.6.
ER -
KUBEČKA, Martin, Jozef TOMAN, Miroslav ŠNÍRER, Ondřej JAŠEK, Vít KUDRLE a Jana JURMANOVÁ. The role of microwave plasma temperature during graphene nanosheets deposition on dielectric substrate: Modelling and experiment. Online. In \textit{NANOCON Conference Proceedings - International Conference on Nanomaterials}. 1. vyd. Ostrava: TANGER Ltd., 2020, s.~80-84. ISBN~978-80-87294-95-6. Dostupné z: https://dx.doi.org/10.37904/nanocon.2019.8455.
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