Optics of Inhomogeneous Thin Films with Defects: Application to
Optical Characterization

J 2021

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

OHLÍDAL, Ivan, Jiří VOHÁNKA a Martin ČERMÁK

Základní údaje

Originální název

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

Autoři

OHLÍDAL, Ivan (203 Česká republika, garant, domácí), Jiří VOHÁNKA (203 Česká republika, domácí) a Martin ČERMÁK (203 Česká republika, domácí)

Vydání

Coatings, Basel, MDPI, 2021, 2079-6412

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

20506 Coating and films

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.236

Kód RIV

RIV/00216224:14310/21:00121114

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.3390/coatings11010022

UT WoS

000610021300001

Klíčová slova anglicky

optical characterization; ellipsometry; reflectometry inhomogeneous films

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 2. 2021 15:05, Mgr. Marie Šípková, DiS.

Anotace

V originále

This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined.

Návaznosti

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA a Martin ČERMÁK. Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization. Coatings. Basel: MDPI, 2021, roč. 11, č. 1, s. 22-52. ISSN 2079-6412. Dostupné z: https://dx.doi.org/10.3390/coatings11010022.

@article{1740136,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Čermák, Martin},
   article_location = {Basel},
   article_number = {1},
   doi = {http://dx.doi.org/10.3390/coatings11010022},
   keywords = {optical characterization; ellipsometry; reflectometry inhomogeneous films},
   language = {eng},
   issn = {2079-6412},
   journal = {Coatings},
   title = {Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization},
   url = {https://www.mdpi.com/2079-6412/11/1/22},
   volume = {11},
   year = {2021}
}

TY  - JOUR
ID  - 1740136
AU  - Ohlídal, Ivan - Vohánka, Jiří - Čermák, Martin
PY  - 2021
TI  - Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization
JF  - Coatings
VL  - 11
IS  - 1
SP  - 22
EP  - 22
PB  - MDPI
SN  - 20796412
KW  - optical characterization
KW  - ellipsometry
KW  - reflectometry inhomogeneous films
UR  - https://www.mdpi.com/2079-6412/11/1/22
L2  - https://www.mdpi.com/2079-6412/11/1/22
N2  - This review paper is devoted to optics of inhomogeneous thin films exhibiting defects consisting in transition layers, overlayers, thickness nonuniformity, boundary roughness and uniaxial anisotropy. The theoretical approaches enabling the inclusion of these defects into formulae expressing the optical quantities of these inhomogeneous thin films are summarized. These approaches are based on the recursive and matrix formalisms for the transition layers and overlayers, averaging of the elements of the Mueller matrix using local thickness distribution or polynomial formulation for the thickness nonuniformity, scalar diffraction theory and Rayleigh-Rice theory or their combination for boundary roughness and Yeh matrix formalism for uniaxial anisotropy. The theoretical results are illustrated using selected examples of the optical characterization of the inhomogeneous polymer-like thin films exhibiting the combination of the transition layers and thickness nonuniformity and inhomogeneous thin films of nonstoichiometric silicon nitride with the combination of boundary roughness and uniaxial anisotropy. This characterization is realized by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. It is shown that using these optical techniques, the complete optical characterization of the mentioned thin films can be performed. Thus, it is presented that the values of all the parameters characterizing these films can be determined.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA a Martin ČERMÁK. Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization. \textit{Coatings}. Basel: MDPI, 2021, roč.~11, č.~1, s.~22-52. ISSN~2079-6412. Dostupné z: https://dx.doi.org/10.3390/coatings11010022.

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