Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{1760383,
author = {Václavik, Richard and Zábranský, Lukáš and Souček, Pavel and Sťahel, Pavel and Buršík, Jiří and Fořt, Tomáš and Buršíková, Vilma},
address = {Ostrava},
booktitle = {NANOCON 2020: 12th International Conference on Nanomaterials - Research & Application},
doi = {http://dx.doi.org/10.37904/nanocon.2020.3776},
keywords = {Ti/Ni; multilayers; magnetron sputtering; nanoindentation; annealing},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-98-7},
pages = {518-523},
publisher = {TANGER Ltd.},
title = {Thermal stability of Ti/Ni multilayer Thin films},
url = {https://doi.org/10.37904/nanocon.2020.3776},
year = {2021}
}
TY - JOUR
ID - 1760383
AU - Václavik, Richard - Zábranský, Lukáš - Souček, Pavel - Sťahel, Pavel - Buršík, Jiří - Fořt, Tomáš - Buršíková, Vilma
PY - 2021
TI - Thermal stability of Ti/Ni multilayer Thin films
PB - TANGER Ltd.
CY - Ostrava
SN - 9788087294987
KW - Ti/Ni
KW - multilayers
KW - magnetron sputtering
KW - nanoindentation
KW - annealing
UR - https://doi.org/10.37904/nanocon.2020.3776
N2 - In this work, thermal stability and mechanical properties of Ti/Ni multilayer thin films were studied. The multilayer thin films were synthesised by alternately depositing Ti and Ni layers using magnetron sputtering. The thickness of constituent layers of Ti and Ni varied from 1.7 nm to 10 nm, and one coating was deposited by simultaneous sputtering of both targets. Single crystalline silicon was used as a substrate. The effects of thermal treatment on the mechanical properties were studied using nanoindentation and discussed in relation to microstructure evaluated by X-ray diffraction. Annealing was carried out under low-pressure conditions for 2 hours in the range of 100–800°C.
ER -
VÁCLAVIK, Richard, Lukáš ZÁBRANSKÝ, Pavel SOUČEK, Pavel SŤAHEL, Jiří BURŠÍK, Tomáš FOŘT a Vilma BURŠÍKOVÁ. Thermal stability of Ti/Ni multilayer Thin films. Online. In \textit{NANOCON 2020: 12th International Conference on Nanomaterials - Research \&{} Application}. Ostrava: TANGER Ltd., 2021, s.~518-523. ISBN~978-80-87294-98-7. Dostupné z: https://dx.doi.org/10.37904/nanocon.2020.3776.
|
