The single-shot spatial-resolved OES of the spoke in
non-reactive HiPIMS

a 2021

The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS

ŠLAPANSKÁ, Marta, Michael KROKER, Jaroslav HNILICA, Peter KLEIN, Petr VAŠINA et. al.

Základní údaje

Originální název

The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS

Autoři

ŠLAPANSKÁ, Marta, Michael KROKER, Jaroslav HNILICA, Peter KLEIN a Petr VAŠINA

Vydání

47th International Conference on Metallurgical Coatings and Thin Films, 2021

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

HiPIMS, ionisation zones, spokes, titanium, argon, spatial-resolved optical emission spectroscopy, ionisation fraction, excitation temperature

Příznaky

Mezinárodní význam

Změněno: 5. 5. 2021 18:42, Mgr. Marta Šlapanská, Ph.D.

Anotace

V originále

The rotating plasma patterns, also known as ionisation zones or spokes, firstly observed in non-reactive high power impulse magnetron sputtering discharges (HiPIMS) are at certain conditions present in direct current magnetron sputtering (dcMS) and radio frequency magnetron sputtering discharges (rfMS) as well. The spokes are investigated due to their high impact on the deposition process and sputtered species' transport. To better understand the spoke phenomena, it is necessary to acquire comprehensive data of the plasma parameters inside the spoke; however, in HiPIMS, preferably by non-invasive diagnostics. This contribution presents the non-invasive spatial-resolved optical emission spectroscopy (OES) of the plasma inside the spoke conducted in non-reactive HiPIMS discharge. The pulses have a duration of 100 µs with a repetition rate of 5 Hz. The 3-inch titanium target was utilised. The experiment was run at argon pressures of 0.4 Pa, 1.0 Pa, and 1.6 Pa to investigate both triangular and round spokes. The fast photodiode and the cylindrical probe were used to capture and determine the passing spoke position. The photodiode's signal and the probe signal were synchronised with the optical emission spectrum acquisition by the intensified charge-coupled device (ICCD) detector with a gate time of 100 ns. By processing these three signals and creating the normalised time scale for each spoke, the unified spoke (UNI-spoke) has been created. Consequently, the evolutions of the selected emission lines can be shown within the UNI-spoke. The spatially resolved emissions of Ar atom and ions and Ti atoms and ions spectral lines were investigated within the UNI-spoke. The spatial resolved OES measurements have shown that the Ar and Ti atoms and ions spectral lines have the characteristic evolution of a specific species' intensity and is the same for all observed spectral lines of this species within the spoke independently of applied pressure. The Boltzmann plot method was utilised to determine the excitation temperatures within the UNI-spoke. The excitation temperatures obtained using the Ar ions and Ti atoms and ions are 13000 K, 8000 K, and 19000 K. The ionisation fraction has been calculated from the selected spectral lines of titanium atom and ion. The ionisation fraction reaches approximately 40%, and its evolution and excitation temperature evolutions remain constant in the margin of standard error within the UNI-spoke for all investigated working pressures.

Návaznosti

GA19-00579S, projekt VaV

Název: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Grantová agentura ČR, Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

LM2018097, velká výzkumná infrastruktura

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

ŠLAPANSKÁ, Marta, Michael KROKER, Jaroslav HNILICA, Peter KLEIN a Petr VAŠINA. The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS. In 47th International Conference on Metallurgical Coatings and Thin Films. 2021.

@proceedings{1765997,
   author = {Šlapanská, Marta and Kroker, Michael and Hnilica, Jaroslav and Klein, Peter and Vašina, Petr},
   booktitle = {47th International Conference on Metallurgical Coatings and Thin Films},
   keywords = {HiPIMS, ionisation zones, spokes, titanium, argon, spatial-resolved optical emission spectroscopy, ionisation fraction, excitation temperature},
   language = {eng},
   title = {The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS},
   url = {https://icmctf2021.avs.org/},
   year = {2021}
}

TY  - CONF
ID  - 1765997
AU  - Šlapanská, Marta - Kroker, Michael - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr
PY  - 2021
TI  - The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS
KW  - HiPIMS, ionisation zones, spokes, titanium, argon, spatial-resolved optical emission spectroscopy, ionisation fraction, excitation temperature
UR  - https://icmctf2021.avs.org/
N2  - The rotating plasma patterns, also known as ionisation zones or spokes, firstly observed in non-reactive high power impulse magnetron sputtering discharges (HiPIMS) are at certain conditions present in direct current magnetron sputtering (dcMS) and radio frequency magnetron sputtering discharges (rfMS) as well. The spokes are investigated due to their high impact on the deposition process and sputtered species' transport. To better understand the spoke phenomena, it is necessary to acquire comprehensive data of the plasma parameters inside the spoke; however, in HiPIMS, preferably by non-invasive diagnostics. This contribution presents the non-invasive spatial-resolved optical emission spectroscopy (OES) of the plasma inside the spoke conducted in non-reactive HiPIMS discharge. The pulses have a duration of 100 µs with a repetition rate of 5 Hz. The 3-inch titanium target was utilised. The experiment was run at argon pressures of 0.4 Pa, 1.0 Pa, and 1.6 Pa to investigate both triangular and round spokes. The fast photodiode and the cylindrical probe were used to capture and determine the passing spoke position. The photodiode's signal and the probe signal were synchronised with the optical emission spectrum acquisition by the intensified charge-coupled device (ICCD) detector with a gate time of 100 ns. By processing these three signals and creating the normalised time scale for each spoke, the unified spoke (UNI-spoke) has been created. Consequently, the evolutions of the selected emission lines can be shown within the UNI-spoke. The spatially resolved emissions of Ar atom and ions and Ti atoms and ions spectral lines were investigated within the UNI-spoke. The spatial resolved OES measurements have shown that the Ar and Ti atoms and ions spectral lines have the characteristic evolution of a specific species' intensity and is the same for all observed spectral lines of this species within the spoke independently of applied pressure. The Boltzmann plot method was utilised to determine the excitation temperatures within the UNI-spoke. The excitation temperatures obtained using the Ar ions and Ti atoms and ions are 13000 K, 8000 K, and 19000 K. The ionisation fraction has been calculated from the selected spectral lines of titanium atom and ion. The ionisation fraction reaches approximately 40%, and its evolution and excitation temperature evolutions remain constant in the margin of standard error within the UNI-spoke for all investigated working pressures.
ER  -

ŠLAPANSKÁ, Marta, Michael KROKER, Jaroslav HNILICA, Peter KLEIN a Petr VAŠINA. The single-shot spatial-resolved OES of the spoke in non-reactive HiPIMS. In \textit{47th International Conference on Metallurgical Coatings and Thin Films}. 2021.

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