Spoke behaviour in reactive HiPIMS

J 2021

Spoke behaviour in reactive HiPIMS

KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ, Petr VAŠINA et. al.

Základní údaje

Originální název

Spoke behaviour in reactive HiPIMS

Autoři

KLEIN, Peter (703 Slovensko, garant, domácí), Jaroslav HNILICA (203 Česká republika, domácí), Matej FEKETE (703 Slovensko, domácí), Marta ŠLAPANSKÁ (203 Česká republika, domácí) a Petr VAŠINA (203 Česká republika, domácí)

Vydání

Plasma Sources Science and Technology, IOP Publishing Ltd, 2021, 0963-0252

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.124

Kód RIV

RIV/00216224:14310/21:00119026

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1088/1361-6595/abfbc5

UT WoS

000661255300001

Klíčová slova anglicky

reactive sputtering; spokes; reactive high power impulse magnetron sputtering

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 14. 7. 2021 09:47, Mgr. Marie Šípková, DiS.

Anotace

V originále

Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating in the E × B direction, called spokes. Many studies were conducted focussing on the characterisation of their appearance, mode number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research has been conducted in the case of reactive sputtering, where only the general spoke characteristics were evaluated. A dual-image fast camera screening was utilised to capture plasma emission on 3'' Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the content of nitrogen in N2/Ar mixture was varied. The shape, velocity and spoke mode number were significantly affected by the higher content of N2 in the mixture. To distinguish between the effects of the modified target surface state and reactive gas present in the plasma volume on spokes experiments with compound NbN target were also performed. Surprisingly, no real differences of spoke behaviour between Nb and NbN targets were observed.

Návaznosti

GA19-00579S, projekt VaV

Název: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Grantová agentura ČR, Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ a Petr VAŠINA. Spoke behaviour in reactive HiPIMS. Plasma Sources Science and Technology. IOP Publishing Ltd, 2021, roč. 30, č. 5, s. "055016", 9 s. ISSN 0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/abfbc5.

@article{1778417,
   author = {Klein, Peter and Hnilica, Jaroslav and Fekete, Matej and Šlapanská, Marta and Vašina, Petr},
   article_number = {5},
   doi = {http://dx.doi.org/10.1088/1361-6595/abfbc5},
   keywords = {reactive sputtering; spokes; reactive high power impulse magnetron sputtering},
   language = {eng},
   issn = {0963-0252},
   journal = {Plasma Sources Science and Technology},
   title = {Spoke behaviour in reactive HiPIMS},
   url = {https://doi.org/10.1088/1361-6595/abfbc5},
   volume = {30},
   year = {2021}
}

TY  - JOUR
ID  - 1778417
AU  - Klein, Peter - Hnilica, Jaroslav - Fekete, Matej - Šlapanská, Marta - Vašina, Petr
PY  - 2021
TI  - Spoke behaviour in reactive HiPIMS
JF  - Plasma Sources Science and Technology
VL  - 30
IS  - 5
SP  - "055016"
EP  - "055016"
PB  - IOP Publishing Ltd
SN  - 09630252
KW  - reactive sputtering
KW  - spokes
KW  - reactive high power impulse magnetron sputtering
UR  - https://doi.org/10.1088/1361-6595/abfbc5
N2  - Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating in the E × B direction, called spokes. Many studies were conducted focussing on the characterisation of their appearance, mode number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research has been conducted in the case of reactive sputtering, where only the general spoke characteristics were evaluated. A dual-image fast camera screening was utilised to capture plasma emission on 3'' Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the content of nitrogen in N2/Ar mixture was varied. The shape, velocity and spoke mode number were significantly affected by the higher content of N2 in the mixture. To distinguish between the effects of the modified target surface state and reactive gas present in the plasma volume on spokes experiments with compound NbN target were also performed. Surprisingly, no real differences of spoke behaviour between Nb and NbN targets were observed.
ER  -

KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ a Petr VAŠINA. Spoke behaviour in reactive HiPIMS. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2021, roč.~30, č.~5, s.~''055016'', 9 s. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/abfbc5.

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