2021
Spoke behaviour in reactive HiPIMS
KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ, Petr VAŠINA et. al.Základní údaje
Originální název
Spoke behaviour in reactive HiPIMS
Autoři
KLEIN, Peter (703 Slovensko, garant, domácí), Jaroslav HNILICA (203 Česká republika, domácí), Matej FEKETE (703 Slovensko, domácí), Marta ŠLAPANSKÁ (203 Česká republika, domácí) a Petr VAŠINA (203 Česká republika, domácí)
Vydání
Plasma Sources Science and Technology, IOP Publishing Ltd, 2021, 0963-0252
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10305 Fluids and plasma physics
Stát vydavatele
Velká Británie a Severní Irsko
Utajení
není předmětem státního či obchodního tajemství
Odkazy
Impakt faktor
Impact factor: 4.124
Kód RIV
RIV/00216224:14310/21:00119026
Organizační jednotka
Přírodovědecká fakulta
UT WoS
000661255300001
Klíčová slova anglicky
reactive sputtering; spokes; reactive high power impulse magnetron sputtering
Štítky
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 14. 7. 2021 09:47, Mgr. Marie Novosadová Šípková, DiS.
Anotace
V originále
Plasma in high-power impulse magnetron sputtering discharge, similarly to other discharges utilising E × B field (Hall thrusters, homopolar devices), undergoes self-organisation into the ionisation zones predominantly rotating in the E × B direction, called spokes. Many studies were conducted focussing on the characterisation of their appearance, mode number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research has been conducted in the case of reactive sputtering, where only the general spoke characteristics were evaluated. A dual-image fast camera screening was utilised to capture plasma emission on 3'' Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the content of nitrogen in N2/Ar mixture was varied. The shape, velocity and spoke mode number were significantly affected by the higher content of N2 in the mixture. To distinguish between the effects of the modified target surface state and reactive gas present in the plasma volume on spokes experiments with compound NbN target were also performed. Surprisingly, no real differences of spoke behaviour between Nb and NbN targets were observed.
Návaznosti
GA19-00579S, projekt VaV |
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LM2018097, projekt VaV |
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