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@inproceedings{1783815,
author = {Kelarová, Štěpánka and Stupavská, Monika and Přibyl, Roman and Buršíková, Vilma},
address = {Ostrava},
booktitle = {NANOCON 2020: 12th International Conference on Nanomaterials - Research & Application},
doi = {http://dx.doi.org/10.37904/nanocon.2020.3773},
keywords = {Trimethylsilyl acetate; PECVD; XPS; microindentation; confocal microscopy},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-98-7},
pages = {535-540},
publisher = {TANGER Ltd.},
title = {Organosilicon plasma polymers deposited in trimethylsilyl acetate/CH4 plasma of capacitively coupled RF glow discharge},
url = {https://doi.org/10.37904/nanocon.2020.3773},
year = {2021}
}
TY - JOUR
ID - 1783815
AU - Kelarová, Štěpánka - Stupavská, Monika - Přibyl, Roman - Buršíková, Vilma
PY - 2021
TI - Organosilicon plasma polymers deposited in trimethylsilyl acetate/CH4 plasma of capacitively coupled RF glow discharge
PB - TANGER Ltd.
CY - Ostrava
SN - 9788087294987
KW - Trimethylsilyl acetate
KW - PECVD
KW - XPS
KW - microindentation
KW - confocal microscopy
UR - https://doi.org/10.37904/nanocon.2020.3773
N2 - Thin solid films based on organosilicon monomers are perspective in many branches of industry as well as for bioapplications. In the present study, plasma of RF capacitively coupled glow discharge in gaseous mixture of trimethylsilyl acetate (TMSA) monomer and methane was used to create SiOxCyHz coatings. This study monitors properties of resulting thin films (surface chemistry, wettability, surface structure and mechanical properties) in dependency on deposition parameters. The main subject of the presented research is the investigation of the relationship between the above-mentioned properties of prepared organosilicon coatings and the flow rate ratio of TMSA monomer and CH4 carrier gas applied during deposition process.
ER -
KELAROVÁ, Štěpánka, Monika STUPAVSKÁ, Roman PŘIBYL and Vilma BURŠÍKOVÁ. Organosilicon plasma polymers deposited in trimethylsilyl acetate/CH4 plasma of capacitively coupled RF glow discharge. Online. In \textit{NANOCON 2020: 12th International Conference on Nanomaterials - Research \&{} Application}. Ostrava: TANGER Ltd., 2021, p.~535-540. ISBN~978-80-87294-98-7. Available from: https://dx.doi.org/10.37904/nanocon.2020.3773.
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