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@proceedings{1820262,
author = {Bernátová, Katarína and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {International Conference on Metallurgical Coatings and Thin Films},
keywords = {plasma diagnostic; ionisation fraction; titanium; nitrogen; pulsed magnetron sputtering},
language = {eng},
title = {Investigation of ionized density fraction in reactive HiPIMS},
url = {https://icmctf2021.avs.org/},
year = {2021}
}
TY - CONF
ID - 1820262
AU - Bernátová, Katarína - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2021
TI - Investigation of ionized density fraction in reactive HiPIMS
KW - plasma diagnostic
KW - ionisation fraction
KW - titanium
KW - nitrogen
KW - pulsed magnetron sputtering
UR - https://icmctf2021.avs.org/
N2 - The presentation described and explained behaviour of the temporal evolution of sputtered particles densities and their ionized density fraction near the target and the substrate during the HiPIMS process. Four main regimes of the hysteresis in the argon-nitrogen atmosphere including two in the metallic regime, the transition regime and the compound regime were compared.
ER -
BERNÁTOVÁ, Katarína, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Investigation of ionized density fraction in reactive HiPIMS. In \textit{International Conference on Metallurgical Coatings and Thin Films}. 2021.
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