Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{1823497,
author = {Přibyl, Roman and Kelarová, Štěpánka and Zábranský, Lukáš and Buršíková, Vilma},
address = {Ostrava},
booktitle = {12th International Conference on Nanomaterials - Research and Application, NANOCON 2020},
doi = {http://dx.doi.org/10.37904/nanocon.2020.3778},
keywords = {Thin films; PECVD; dusty plasma; surface properties},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-98-7},
pages = {541-546},
publisher = {TANGER Ltd.},
title = {Comparison of HMDSO and HMDSZ thin films growth under dusty plasma conditions},
url = {https://www.confer.cz/nanocon/2020/3778-comparison-of-hmdso-and-hmdsz-thin-films-growth-under-dusty-plasma-conditions},
year = {2021}
}
TY - JOUR
ID - 1823497
AU - Přibyl, Roman - Kelarová, Štěpánka - Zábranský, Lukáš - Buršíková, Vilma
PY - 2021
TI - Comparison of HMDSO and HMDSZ thin films growth under dusty plasma conditions
PB - TANGER Ltd.
CY - Ostrava
SN - 9788087294987
KW - Thin films
KW - PECVD
KW - dusty plasma
KW - surface properties
UR - https://www.confer.cz/nanocon/2020/3778-comparison-of-hmdso-and-hmdsz-thin-films-growth-under-dusty-plasma-conditions
N2 - The present study is focused on the preparation of thin films by plasma enhanced chemical vapor deposition (PEDCV) in capacitively coupled plasma (CCP). Thin films were deposited from a mixture of oxygen and hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ). Both monomers are well known and enable to prepare films with excellent properties such as high hardness, good abrasion resistance, hydrophobicity, and antibacterial properties. Also, these monomers are known for the creation of complex structures in plasma. This phenomenon is so-called dusty plasma. The main aim of the present work was to prepare a comparative study on the dust formation in both monomers. Complex study of surface and mechanical properties and chemical composition was done by a wide range of analytical instruments such as atomic force microscopy (AFM), nanoindentation technique, confocal microscopy, infrared spectroscopy with Fourier transformation (FTIR), stylus profilometer, and surface energy evaluation system (SEE system).
ER -
PŘIBYL, Roman, Štěpánka KELAROVÁ, Lukáš ZÁBRANSKÝ a Vilma BURŠÍKOVÁ. Comparison of HMDSO and HMDSZ thin films growth under dusty plasma conditions. Online. In \textit{12th International Conference on Nanomaterials - Research and Application, NANOCON 2020}. Ostrava: TANGER Ltd., 2021, s.~541-546. ISBN~978-80-87294-98-7. Dostupné z: https://dx.doi.org/10.37904/nanocon.2020.3778.
|
