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@article{1828358,
author = {Stopka, Jan and Zuidema, Wilco and Kruit, Pieter},
article_location = {Amsterdam},
article_number = {223},
doi = {http://dx.doi.org/10.1016/j.ultramic.2021.113223},
keywords = {Trajectory displacement; Multi-beam electron microscope; Coulomb interactions; Slice method; Electron optics},
issn = {0304-3991},
journal = {Ultramicroscopy},
title = {Trajectory displacement in a multi beam scanning electron microscope},
url = {https://doi.org/10.1016/j.ultramic.2021.113223},
year = {2021}
}
TY - JOUR
ID - 1828358
AU - Stopka, Jan - Zuidema, Wilco - Kruit, Pieter
PY - 2021
TI - Trajectory displacement in a multi beam scanning electron microscope
JF - Ultramicroscopy
IS - 223
PB - Elsevier
SN - 03043991
KW - Trajectory displacement
KW - Multi-beam electron microscope
KW - Coulomb interactions
KW - Slice method
KW - Electron optics
UR - https://doi.org/10.1016/j.ultramic.2021.113223
N2 - The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.
ER -
STOPKA, Jan, Wilco ZUIDEMA a Pieter KRUIT. Trajectory displacement in a multi beam scanning electron microscope. \textit{Ultramicroscopy}. Amsterdam: Elsevier, 2021, č.~223. ISSN~0304-3991. Dostupné z: https://dx.doi.org/10.1016/j.ultramic.2021.113223.
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