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@article{1876018, author = {Dvořák, Pavel and Pálenik, Juraj and Tkáčik, Maroš and Pospíšil, Zdeněk}, article_number = {8}, doi = {http://dx.doi.org/10.1088/1361-6595/ac83eb}, keywords = {plasma; Langmuir probe; uncompensated probe; plasma potential; CCP}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Langmuir probe without RF compensation}, url = {https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb}, volume = {31}, year = {2022} }
TY - JOUR ID - 1876018 AU - Dvořák, Pavel - Pálenik, Juraj - Tkáčik, Maroš - Pospíšil, Zdeněk PY - 2022 TI - Langmuir probe without RF compensation JF - Plasma Sources Science and Technology VL - 31 IS - 8 SP - 1-5 EP - 1-5 PB - IOP Publishing Ltd SN - 09630252 KW - plasma KW - Langmuir probe KW - uncompensated probe KW - plasma potential KW - CCP UR - https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb N2 - Langmuir probes with RF compensation are used for measurements of electron concentration, electron temperature and the DC value of plasma potential in RF discharges. In order to obtain all the RF components of plasma potential, simple probes without RF compensation are used. However, it has been believed that these uncompensated probes can not be used for determination of the DC value of plasma potential and of electron concentration and temperature, since their VA characteristics is distorted by the RF current. Consequently, the evaluation of data measured with uncompensated probes was not possible without additional measurement with a RF compensated Langmuir probe. This contribution analyzes the possibility to use uncompensated probes not only for measurement of RF components of plasma potential, but also for measurement of the DC component of plasma potential, electron concentration and electron temperature. ER -
DVOŘÁK, Pavel, Juraj PÁLENIK, Maroš TKÁČIK a Zdeněk POSPÍŠIL. Langmuir probe without RF compensation. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2022, roč.~31, č.~8, s.~1-5. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ac83eb.
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