Langmuir probe without RF compensation

DVOŘÁK, Pavel, Juraj PÁLENIK, Maroš TKÁČIK and Zdeněk POSPÍŠIL. Langmuir probe without RF compensation. Plasma Sources Science and Technology. IOP Publishing Ltd, 2022, vol. 31, No 8, p. 1-5. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/ac83eb.

Basic information

• Original name: Langmuir probe without RF compensation
• Authors: DVOŘÁK, Pavel (203 Czech Republic, guarantor, belonging to the institution), Juraj PÁLENIK (703 Slovakia, belonging to the institution), Maroš TKÁČIK (703 Slovakia, belonging to the institution) and Zdeněk POSPÍŠIL (203 Czech Republic, belonging to the institution).
• Edition: Plasma Sources Science and Technology, IOP Publishing Ltd, 2022, 0963-0252.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United Kingdom of Great Britain and Northern Ireland
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 3.800
• RIV identification code: RIV/00216224:14310/22:00126312
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1088/1361-6595/ac83eb
• UT WoS: 000841586300001
• Keywords (in Czech): plazma; Langmuirova sonda; nekompenzovaná sonda; potenciál plazmatu; CCP
• Keywords in English: plasma; Langmuir probe; uncompensated probe; plasma potential; CCP
• Tags: rivok
• Tags: International impact, Reviewed

Abstract

Langmuir probes with RF compensation are used for measurements of electron concentration, electron temperature and the DC value of plasma potential in RF discharges. In order to obtain all the RF components of plasma potential, simple probes without RF compensation are used. However, it has been believed that these uncompensated probes can not be used for determination of the DC value of plasma potential and of electron concentration and temperature, since their VA characteristics is distorted by the RF current. Consequently, the evaluation of data measured with uncompensated probes was not possible without additional measurement with a RF compensated Langmuir probe. This contribution analyzes the possibility to use uncompensated probes not only for measurement of RF components of plasma potential, but also for measurement of the DC component of plasma potential, electron concentration and electron temperature.

Links

• GA19-15240S, research and development project: Name: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Czech Science Foundation

• 90097, large research infrastructures: Name: CEPLANT