JANČA, Jan, P. KRYŠTOF, Karel NAVRÁTIL, Zdeněk BOCHNÍČEK a Petr NĚMEC. Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture. Acta Physica Univesitatis Comenianae. Bratislava, 1995, roč. 36, č. 5, s. 57. ISSN 80-22306460. |
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@article{197263, author = {Janča, Jan and Kryštof, P. and Navrátil, Karel and Bochníček, Zdeněk and Němec, Petr}, article_location = {Bratislava}, article_number = {5}, language = {eng}, issn = {80-22306460}, journal = {Acta Physica Univesitatis Comenianae}, title = {Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture}, volume = {36}, year = {1995} }
TY - JOUR ID - 197263 AU - Janča, Jan - Kryštof, P. - Navrátil, Karel - Bochníček, Zdeněk - Němec, Petr PY - 1995 TI - Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture JF - Acta Physica Univesitatis Comenianae VL - 36 IS - 5 SP - 57 EP - 57 SN - 8022306460 ER -
JANČA, Jan, P. KRYŠTOF, Karel NAVRÁTIL, Zdeněk BOCHNÍČEK a Petr NĚMEC. Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture. \textit{Acta Physica Univesitatis Comenianae}. Bratislava, 1995, roč.~36, č.~5, s.~57. ISSN~80-22306460.
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