KUČÍRKOVÁ, Assja, Karel NAVRÁTIL a J. ZEMEK. Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films. Thin Solid Films. UK Oxford: Elsevier science, 1998, (323)1998, -, s. 53-58. ISSN 0040-6090. |
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@article{200299, author = {Kučírková, Assja and Navrátil, Karel and Zemek, J.}, article_location = {UK Oxford}, article_number = {-}, keywords = {thin films}, language = {eng}, issn = {0040-6090}, journal = {Thin Solid Films}, title = {Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films}, volume = {(323)1998}, year = {1998} }
TY - JOUR ID - 200299 AU - Kučírková, Assja - Navrátil, Karel - Zemek, J. PY - 1998 TI - Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films JF - Thin Solid Films VL - (323)1998 IS - - SP - 53 EP - 53 PB - Elsevier science SN - 00406090 KW - thin films ER -
KUČÍRKOVÁ, Assja, Karel NAVRÁTIL a J. ZEMEK. Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films. \textit{Thin Solid Films}. UK Oxford: Elsevier science, 1998, (323)1998, -, s.~53-58. ISSN~0040-6090.
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