OHLÍDAL, Ivan, Daniel FRANTA, Jaroslav HORA, Karel NAVRÁTIL, Jan WEBER a Pavel JANDA. Analysis of thin films with slightly rough boundaries. Mikrochim. Acta. Wien: Springer-Verlag, 1998, Suppl. 15, č. 1, s. 177-180. ISSN 0026-3672. |
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@article{200406, author = {Ohlídal, Ivan and Franta, Daniel and Hora, Jaroslav and Navrátil, Karel and Weber, Jan and Janda, Pavel}, article_location = {Wien}, article_number = {1}, keywords = {Spectroscopic Ellipsometry; Spectroscopic Reflectometry; Atomic Force Microscopy}, language = {eng}, issn = {0026-3672}, journal = {Mikrochim. Acta}, title = {Analysis of thin films with slightly rough boundaries}, url = {http://hydra.physics.muni.cz/~franta/bib/MA15_177.html}, volume = {Suppl. 15}, year = {1998} }
TY - JOUR ID - 200406 AU - Ohlídal, Ivan - Franta, Daniel - Hora, Jaroslav - Navrátil, Karel - Weber, Jan - Janda, Pavel PY - 1998 TI - Analysis of thin films with slightly rough boundaries JF - Mikrochim. Acta VL - Suppl. 15 IS - 1 SP - 177 EP - 177 PB - Springer-Verlag SN - 00263672 KW - Spectroscopic Ellipsometry KW - Spectroscopic Reflectometry KW - Atomic Force Microscopy UR - http://hydra.physics.muni.cz/~franta/bib/MA15_177.html N2 - In this paper presented method is based on a combination of variable angle spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy enabling us to determine the optical parameters and most significant statistical parameters of the rough boundaries characterizing the slightly rough single layers. ER -
OHLÍDAL, Ivan, Daniel FRANTA, Jaroslav HORA, Karel NAVRÁTIL, Jan WEBER a Pavel JANDA. Analysis of thin films with slightly rough boundaries. \textit{Mikrochim. Acta}. Wien: Springer-Verlag, 1998, Suppl. 15, č.~1, s.~177-180. ISSN~0026-3672.
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