PINKAS, Jiří, J. C. HUFFMAN, J. C. BOLLINGER, W. E. STREIB, D. V. BAXTER, M. H. CHISHOLM and K. G. CAULTON. Syntheses, Structures and Thermal Behavior of Cu hfacac Complexes Derived from Ethanolamines. Inorg. Chem. Spojené státy americké: American Chemical Society, 1997, vol. 36, No 14, p. 2930-2937. ISSN 0020-1669.
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Basic information
Original name Syntheses, Structures and Thermal Behavior of Cu hfacac Complexes Derived from Ethanolamines
Authors PINKAS, Jiří, J. C. HUFFMAN, J. C. BOLLINGER, W. E. STREIB, D. V. BAXTER, M. H. CHISHOLM and K. G. CAULTON.
Edition Inorg. Chem. Spojené státy americké, American Chemical Society, 1997, 0020-1669.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10402 Inorganic and nuclear chemistry
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 2.736
Organization unit Faculty of Science
Keywords in English copper; MOCVD; ethanolamines; thin films
Tags copper, ethanolamines, MOCVD, thin films
Changed by Changed by: prof. RNDr. Jiří Pinkas, Ph.D., učo 627. Changed: 15/8/2001 09:26.
Abstract
A series of novel precursors for MOCVD of metallic copper have been synthesized and structurally characterized. The mechanism of their transformation was studied by XRD, MS, NMR, DSC, and TGA-MS techniques. These precursors are formed from Cu(hfacac)2, which serves as a volatile source of Cu, and aminoalcohols, which act as reductants and anchor firmly to the copper center through the amine unit. In some cases, a proton transfer from the coordinated alcohol to the hfacac ligand results in the formation of an alkoxide unit and the release of the free Hhfacac. Metallic copper films can be deposited by MOCVD at 300 oC without any external reductant. Crystal data: Cu(hfacac)2.C7H8 (-103 oC); a = 6.510(6) A, b = 8.594(7) A, c = 18.478(15) A, orthorhombic space group Pmnn, Z = 2. Cu(hfacac)2(H2NCH2CH2OH) (-158 oC); a = 13.145(1) A, b = 13.418(1) A, c = 11.245(1) A, alpha = 110.39(1), beta = 99.12(1), gamma = 97.90(1) deg, triclinic space group P1bar, Z = 4. [Cu(hfacac)(Me2NCH2CH2O)]2 (-153 oC); a = 9.259(2) A, b = 12.011(3) A, c = 6.304(1) A, alpha = 91.19(1), beta = 106.66(1), gamma = 74.83(1) deg, triclinic space group P1bar, Z = 1. Cu(hfacac)[N(CH2CH2OH)2(CH2CH2O)].1/2MeOH (-168 oC); a = 10.075(4) A, b = 8.611(4) A, c = 19.259(9) A, beta = 99.82(2) deg, monoclinic space group P21/m, Z = 4.
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