JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, P. HUDEK, I. KOSTIČ and A. KONEČNÍKOVÁ. Structural characterization of a lamellar W/Si multilayer grating. J. Appl. Phys. USA: American Institute of Physics, 1999, vol. 85, No 2, p. 1225-1227. ISSN 0021-8979. |
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@article{205364, author = {Jergel, M. and Mikulík, Petr and Majková, E. and Luby, Š. and Senderák, R. and Pinčík, E. and Brunel, M. and Hudek, P. and Kostič, I. and Konečníková, A.}, article_location = {USA}, article_number = {2}, keywords = {x-ray reflectivity; gratings; multilayers}, language = {eng}, issn = {0021-8979}, journal = {J. Appl. Phys.}, title = {Structural characterization of a lamellar W/Si multilayer grating}, url = {http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikRapid}, volume = {85}, year = {1999} }
TY - JOUR ID - 205364 AU - Jergel, M. - Mikulík, Petr - Majková, E. - Luby, Š. - Senderák, R. - Pinčík, E. - Brunel, M. - Hudek, P. - Kostič, I. - Konečníková, A. PY - 1999 TI - Structural characterization of a lamellar W/Si multilayer grating JF - J. Appl. Phys. VL - 85 IS - 2 SP - 1225 EP - 1225 PB - American Institute of Physics SN - 00218979 KW - x-ray reflectivity KW - gratings KW - multilayers UR - http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikRapid N2 - A lamellar multilayer grating of the nominal normal and lateral periods 8 nm and 800 nm, respectively, was obtained by etching a planar amorphous W/Si multilayer up to the substrate. The specular reflectivity, grating truncation rods of non-zero orders, and a reciprocal space map of the scattered intensity close to the total external reflection were measured using the CuKa radiation. For the first time, we demonstrate an extraction of real structural parameters of a fully etched periodic multilayer grating from fitting the measured truncation rods based on the matrix modal eigenvalue approach to the dynamical theory of reflectivity by gratings. ER -
JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, P. HUDEK, I. KOSTIČ and A. KONEČNÍKOVÁ. Structural characterization of a lamellar W/Si multilayer grating. \textit{J. Appl. Phys.}. USA: American Institute of Physics, 1999, vol.~85, No~2, p.~1225-1227. ISSN~0021-8979.
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