JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, I. KOSTIČ and A. KONEČNÍKOVÁ. Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy. J. Phys. D: Appl. Phys. Velká Britanie: IOP Publishing Ltd, 1999, vol. 32, No 9999, p. A220, 4 pp. ISSN 0022-3727.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy
Name in Czech Strukturní charakterizace planárních W/Si vrstevnatých mřížek rtg reflektivitou a skenovací elektronovou mikroskopií
Authors JERGEL, M., Petr MIKULÍK (203 Czech Republic, guarantor), E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, I. KOSTIČ and A. KONEČNÍKOVÁ.
Edition J. Phys. D: Appl. Phys. Velká Britanie, IOP Publishing Ltd, 1999, 0022-3727.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher United Kingdom of Great Britain and Northern Ireland
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 1.188
RIV identification code RIV/00216224:14310/99:00000993
Organization unit Faculty of Science
UT WoS 000080730000044
Keywords in English gratings; multilayers; x-ray reflectivity
Tags gratings, multilayers, x-ray reflectivity
Tags International impact, Reviewed
Changed by Changed by: doc. RNDr. Petr Mikulík, Ph.D., učo 855. Changed: 12/2/2007 18:56.
Abstract
Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study.
Abstract (in Czech)
Strukturní charakterizace leptaných amorfních W/Si vrstevnatých mřížek s laterální periodicitou 800 nm rtg reflektivitou. Drsnost rozhraní byla vzata do úvahy přístupem utlumení koherentní amplitudy u zobecněných Fresnelových koeficientů.
Links
MSM 143100002, plan (intention)Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures
PrintDisplayed: 18/10/2024 01:18