| BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ a Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s. 192-195. ISBN 80-967454-6-8. |
Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{205640,
author = {Buršíková, Vilma and Zajíčková, Lenka and Janča, Jan},
address = {Bratislava},
booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma},
edition = {1.},
keywords = {mechanical properties; thin Films; PECVD},
language = {eng},
location = {Bratislava},
isbn = {80-967454-6-8},
pages = {192-195},
publisher = {MFF UK, Bratislava},
title = {Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions},
year = {1998}
}
TY - JOUR
ID - 205640
AU - Buršíková, Vilma - Zajíčková, Lenka - Janča, Jan
PY - 1998
TI - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
PB - MFF UK, Bratislava
CY - Bratislava
SN - 8096745468
KW - mechanical properties
KW - thin Films
KW - PECVD
N2 - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
ER -
BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ a Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s.~192-195. ISBN~80-967454-6-8.
|
