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@inproceedings{205652, author = {Češka, Zbyněk and Janča, Jan and Dvořák, M.}, address = {Praha}, booktitle = {WDS 98}, edition = {1}, keywords = {ECR plasma; thin films}, language = {eng}, location = {Praha}, isbn = {80-85863-29-4}, pages = {327-331}, publisher = {Karlova univerzita, Praha}, title = {ECR plasma deposition of thin films}, year = {1998} }
TY - JOUR ID - 205652 AU - Češka, Zbyněk - Janča, Jan - Dvořák, M. PY - 1998 TI - ECR plasma deposition of thin films PB - Karlova univerzita, Praha CY - Praha SN - 8085863294 KW - ECR plasma KW - thin films ER -
ČEŠKA, Zbyněk, Jan JANČA a M. DVOŘÁK. ECR plasma deposition of thin films. In \textit{WDS 98}. 1. vyd. Praha: Karlova univerzita, Praha, 1998, s.~327-331. ISBN~80-85863-29-4.
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