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@inproceedings{205653,
author = {Eliáš, Marek and Janča, Jan},
address = {Bratislava},
booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma},
edition = {1.},
keywords = {diagnostics; RF plasma; CNx films},
language = {eng},
location = {Bratislava},
isbn = {80-967454-6-8},
pages = {54-57},
publisher = {MFF UK, Bratislava},
title = {Diagnostics of RF Plasma During CNx Film Deposition},
year = {1998}
}
TY - JOUR
ID - 205653
AU - Eliáš, Marek - Janča, Jan
PY - 1998
TI - Diagnostics of RF Plasma During CNx Film Deposition
VL - Part 1
PB - MFF UK, Bratislava
CY - Bratislava
SN - 8096745468
KW - diagnostics
KW - RF plasma
KW - CNx films
ER -
ELIÁŠ, Marek a Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s.~54-57. Part 1. ISBN~80-967454-6-8.
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