| ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ a Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s. 170-173. ISBN 80-967454-6-8. |
Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{205890,
author = {Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan},
address = {Bratislava},
booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma},
edition = {1.},
keywords = {carbon films; deposition; PECVD},
language = {eng},
location = {Bratislava},
isbn = {80-967454-6-8},
pages = {170-173},
publisher = {MFF UK, Bratislava},
title = {Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD},
year = {1998}
}
TY - JOUR
ID - 205890
AU - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan
PY - 1998
TI - Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
PB - MFF UK, Bratislava
CY - Bratislava
SN - 8096745468
KW - carbon films
KW - deposition
KW - PECVD
N2 - Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
ER -
ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ a Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1. vyd. Bratislava: MFF UK, Bratislava, 1998, s.~170-173. ISBN~80-967454-6-8.
|
