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@inproceedings{205905, author = {Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan}, address = {Bratislava, Slovakia}, booktitle = {International Workshop on Diagnostics of Solid State Surfaces and Interfaces}, edition = {1.}, keywords = {plasma enhanced CVD}, language = {eng}, location = {Bratislava, Slovakia}, pages = {28-29}, publisher = {UK Bratislava, Slovakia}, title = {Properties of Silicon Containing Thin Films Deposited by PECVD}, year = {1998} }
TY - JOUR ID - 205905 AU - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan PY - 1998 TI - Properties of Silicon Containing Thin Films Deposited by PECVD PB - UK Bratislava, Slovakia CY - Bratislava, Slovakia KW - plasma enhanced CVD N2 - Properties of Silicon Containing Thin Films Deposited by PECVD ER -
ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ a Jan JANČA. Properties of Silicon Containing Thin Films Deposited by PECVD. In \textit{International Workshop on Diagnostics of Solid State Surfaces and Interfaces}. 1. vyd. Bratislava, Slovakia: UK Bratislava, Slovakia, 1998, s.~28-29.
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