Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{217291,
author = {Janča, Marek and Janča, Jan and Kudrle, Vít and Tálský, Antonín},
address = {Praha},
booktitle = {Proceedings of 14th International Symposium on Plasma Chemistry},
language = {eng},
location = {Praha},
pages = {1843-1848},
publisher = {UFP AV CR},
title = {Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance},
year = {1999}
}
TY - JOUR
ID - 217291
AU - Janča, Marek - Janča, Jan - Kudrle, Vít - Tálský, Antonín
PY - 1999
TI - Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance
PB - UFP AV CR
CY - Praha
ER -
JANČA, Marek, Jan JANČA, Vít KUDRLE a Antonín TÁLSKÝ. Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance. In \textit{Proceedings of 14th International Symposium on Plasma Chemistry}. Praha: UFP AV CR, 1999, s.~1843-1848.
|
