Optical characterization of inhomogeneous thin films with
randomly rough boundaries exhibiting wide intervals of spatial
frequencies

J 2022

Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jan DVOŘÁK, Petr KLAPETEK et. al.

Základní údaje

Originální název

Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies

Autoři

OHLÍDAL, Ivan (203 Česká republika, garant, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Jan DVOŘÁK (203 Česká republika, domácí), Petr KLAPETEK a Nupinder Jeet KAUR

Vydání

Optics Express, Optica Publishing Group, 2022, 1094-4087

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.800

Kód RIV

RIV/00216224:14310/22:00127746

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1364/OE.470692

UT WoS

000879196300008

Klíčová slova anglicky

optical characterization; ellipsometry; spectrophotometry; roughness; Rayleigh–Rice theory; polymer; thin film; single-crystal substrate; silicon

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 2. 2024 10:04, Mgr. Marie Šípková, DiS.

Anotace

V originále

Results concerning the optical characterization of two inhomogeneous polymer-like thin films deposited by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are presented. One of these films is deposited onto a smooth silicon surface while the latter film is deposited on a randomly rough silicon surface with a wide interval of spatial frequencies. A combination of variable-angle spectroscopic ellipsometry and spectroscopic reflectometry applied at near-normal incidence are utilized for characterizing both the films. An inhomogeneity of the films is described by the method based on multiple-beam interference of light and method replacing inhomogeneous thin films by multilayer systems. Homogeneous transition layers between the films and substrates are considered. The Campi–Coriasso dispersion model is used to express spectral dependencies of the optical constants of the polymer-like films and transition layers. A combination of the scalar diffraction theory and Rayleigh–Rice theory is used to include boundary roughness into formulae for the optical quantities of the rough polymer-like film. Within the optical characterization, the spectral dependencies of the optical constants at the upper and lower boundaries of both the polymer-like films are determined together with their thickness values and profiles of the optical constants. Roughness parameters are determined for the rough film. The values of the roughness parameters are confirmed by atomic force microscopy. Moreover, the optical constants and thicknesses of both the transition layers are determined. A discussion of the achieved results for both the polymer-like films and transition layers is performed.

Návaznosti

FV40328, projekt VaV

Název: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministerstvo průmyslu a obchodu ČR, Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

90097, velká výzkumná infrastruktura

Název: CEPLANT

90110, velká výzkumná infrastruktura

Název: CzechNanoLab

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jan DVOŘÁK, Petr KLAPETEK a Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. Optics Express. Optica Publishing Group, 2022, roč. 30, č. 21, s. 39068-39085. ISSN 1094-4087. Dostupné z: https://dx.doi.org/10.1364/OE.470692.

@article{2243981,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Buršíková, Vilma and Dvořák, Jan and Klapetek, Petr and Kaur, Nupinder Jeet},
   article_number = {21},
   doi = {http://dx.doi.org/10.1364/OE.470692},
   keywords = {optical characterization; ellipsometry; spectrophotometry; roughness; Rayleigh–Rice theory; polymer; thin film; single-crystal substrate; silicon},
   language = {eng},
   issn = {1094-4087},
   journal = {Optics Express},
   title = {Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies},
   url = {https://doi.org/10.1364/OE.470692},
   volume = {30},
   year = {2022}
}

TY  - JOUR
ID  - 2243981
AU  - Ohlídal, Ivan - Vohánka, Jiří - Buršíková, Vilma - Dvořák, Jan - Klapetek, Petr - Kaur, Nupinder Jeet
PY  - 2022
TI  - Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies
JF  - Optics Express
VL  - 30
IS  - 21
SP  - 39068-39085
EP  - 39068-39085
PB  - Optica Publishing Group
SN  - 10944087
KW  - optical characterization
KW  - ellipsometry
KW  - spectrophotometry
KW  - roughness
KW  - Rayleigh–Rice theory
KW  - polymer
KW  - thin film
KW  - single-crystal substrate
KW  - silicon
UR  - https://doi.org/10.1364/OE.470692
N2  - Results concerning the optical characterization of two inhomogeneous polymer-like thin films deposited by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are presented. One of these films is deposited onto a smooth silicon surface while the latter film is deposited on a randomly rough silicon surface with a wide interval of spatial frequencies. A combination of variable-angle spectroscopic ellipsometry and spectroscopic reflectometry applied at near-normal incidence are utilized for characterizing both the films. An inhomogeneity of the films is described by the method based on multiple-beam interference of light and method replacing inhomogeneous thin films by multilayer systems. Homogeneous transition layers between the films and substrates are considered. The Campi–Coriasso dispersion model is used to express spectral dependencies of the optical constants of the polymer-like films and transition layers. A combination of the scalar diffraction theory and Rayleigh–Rice theory is used to include boundary roughness into formulae for the optical quantities of the rough polymer-like film. Within the optical characterization, the spectral dependencies of the optical constants at the upper and lower boundaries of both the polymer-like films are determined together with their thickness values and profiles of the optical constants. Roughness parameters are determined for the rough film. The values of the roughness parameters are confirmed by atomic force microscopy. Moreover, the optical constants and thicknesses of both the transition layers are determined. A discussion of the achieved results for both the polymer-like films and transition layers is performed.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jan DVOŘÁK, Petr KLAPETEK a Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. \textit{Optics Express}. Optica Publishing Group, 2022, roč.~30, č.~21, s.~39068-39085. ISSN~1094-4087. Dostupné z: https://dx.doi.org/10.1364/OE.470692.

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