| GABRIEL, Vít, Pavel KOCÁN a Václav HOLÝ. Growth-rate model of epitaxial layer-by-layer growth by pulsed-laser deposition. Physical Review E. American Physical Society, 2022, roč. 106, č. 3, s. 1-9. ISSN 2470-0045. Dostupné z: https://dx.doi.org/10.1103/PhysRevE.106.035302. |
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@article{2247615,
author = {Gabriel, Vít and Kocán, Pavel and Holý, Václav},
article_number = {3},
doi = {http://dx.doi.org/10.1103/PhysRevE.106.035302},
keywords = {Growth; Nucleation on surfaces; Thin films; Mean-field and cluster methods},
language = {eng},
issn = {2470-0045},
journal = {Physical Review E},
title = {Growth-rate model of epitaxial layer-by-layer growth by pulsed-laser deposition},
url = {https://journals.aps.org/pre/abstract/10.1103/PhysRevE.106.035302},
volume = {106},
year = {2022}
}
TY - JOUR
ID - 2247615
AU - Gabriel, Vít - Kocán, Pavel - Holý, Václav
PY - 2022
TI - Growth-rate model of epitaxial layer-by-layer growth by pulsed-laser deposition
JF - Physical Review E
VL - 106
IS - 3
SP - 1-9
EP - 1-9
PB - American Physical Society
SN - 24700045
KW - Growth
KW - Nucleation on surfaces
KW - Thin films
KW - Mean-field and cluster methods
UR - https://journals.aps.org/pre/abstract/10.1103/PhysRevE.106.035302
N2 - We present a numerical model of epitaxial thin-film growth applicable for pulsed-laser deposition on a single crystalline substrate. The model is based on rate equations describing the time development of monolayer coverages and of densities of movable particles on atomically flat terraces. Numerical solution of the equations showed that the time dependence of surface roughness obeys a scaling law, the exponent of which depends on probabilities of various atomistic processes included in the simulation model. From the time dependence of monolayer coverages we calculated x-ray diffracted intensity in a quasiforbidden anti-Bragg reflection and showed that its oscillatory behavior is affected by these probabilities as well. The results show the possibility to study atomistic processes during the deposition from the time dependence of the anti-Bragg intensity measured during deposition.
ER -
GABRIEL, Vít, Pavel KOCÁN a Václav HOLÝ. Growth-rate model of epitaxial layer-by-layer growth by pulsed-laser deposition. \textit{Physical Review E}. American Physical Society, 2022, roč.~106, č.~3, s.~1-9. ISSN~2470-0045. Dostupné z: https://dx.doi.org/10.1103/PhysRevE.106.035302.
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