| KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA, Ulf HELMERSSON a Petr VAŠINA. Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS. Plasma Sources Science and Technology. IOP Publishing Ltd, 2023, roč. 32, č. 7, s. 1-8. ISSN 0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ace8b8. |
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@article{2301337,
author = {Klein, Peter and Hnilica, Jaroslav and Lundin, Daniel and Dvořák, Pavel and Zanáška, Michal and Helmersson, Ulf and Vašina, Petr},
article_number = {7},
doi = {http://dx.doi.org/10.1088/1361-6595/ace8b8},
keywords = {bipolar HiPIMS; fast camera screening; plasma diagnostics; emission spectroscopy; HiPIMS},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS},
url = {https://doi.org/10.1088/1361-6595/ace8b8},
volume = {32},
year = {2023}
}
TY - JOUR
ID - 2301337
AU - Klein, Peter - Hnilica, Jaroslav - Lundin, Daniel - Dvořák, Pavel - Zanáška, Michal - Helmersson, Ulf - Vašina, Petr
PY - 2023
TI - Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
JF - Plasma Sources Science and Technology
VL - 32
IS - 7
SP - 1-8
EP - 1-8
PB - IOP Publishing Ltd
SN - 09630252
KW - bipolar HiPIMS
KW - fast camera screening
KW - plasma diagnostics
KW - emission spectroscopy
KW - HiPIMS
UR - https://doi.org/10.1088/1361-6595/ace8b8
N2 - Bipolar high power impulse magnetron sputtering introduces new possibilities to affect positive ions created during the negative discharge pulse in order to tailor thin films with specific parameters. This paper studies plasma emission in different experimental conditions during different phases of the positive pulse with spectral, spatial and temporal resolution. It is found that predominantly the working gas gives rise to plasma emission during the positive pulse. The plasma emission is observed only in regions of low magnetic confinement, forming a 'mushroom-like' shape in the middle of the target or a 'dome-like' shape on the outer parts of the target. An explanation of the discharge kinetics is proposed based on the acquired data.
ER -
KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA, Ulf HELMERSSON a Petr VAŠINA. Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2023, roč.~32, č.~7, s.~1-8. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ace8b8.
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