J 2011

A long-range scanning probe microscope for automotive reflector optical quality inspection

KLAPETEK, Petr, Miroslav VALTR a Martin MATULA

Základní údaje

Originální název

A long-range scanning probe microscope for automotive reflector optical quality inspection

Autoři

KLAPETEK, Petr, Miroslav VALTR a Martin MATULA

Vydání

MEASUREMENT SCIENCE & TECHNOLOGY, BRISTOL, IOP PUBLISHING LTD, 2011, 0957-0233

Další údaje

Typ výsledku

Článek v odborném periodiku

Utajení

není předmětem státního či obchodního tajemství

Impakt faktor

Impact factor: 1.494

DOI

UT WoS

000294764800012

Klíčová slova anglicky

atomic force microscopy; measurement uncertainty

Příznaky

Mezinárodní význam, Recenzováno
Změněno: 22. 3. 2024 10:03, Mgr. Miroslav Valtr, Ph.D.

Anotace

V originále

A long-range scanning probe microscope (SPM) designed for the measurement of micro-and nanoscale forms, roughness and surface defects was constructed. It is based on commercial crossed roller bearing stages combined with piezoceramic actuators used to compensate the imperfections of the bearing mechanism. Three interferometers are used for all three-axis translation monitoring and feedback. For stage rotation monitoring (axis normal to the sample surface), an autocollimator is used. For nonplanarity compensation and two more axis rotation compensations (axes parallel to sample surface), an optical quality reference plane and a set of tunneling current sensors are used. The developed system enables us to perform large-scale measurements of the surface form with no influence of positioning system non-planarities and piezoceramic component hysteresis. In contrast to specialized metrology systems, e. g. using a six-axis interferometer for stage motion monitoring and feedback, this approach enables a more compact and much cheaper metrology SPM construction.