Determination of Optical and Structural Parameters of Thin
Films with Differently Rough Boundaries

J 2024

Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan DVOŘÁK, Vilma BURŠÍKOVÁ, Petr KLAPETEK et. al.

Základní údaje

Originální název

Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries

Autoři

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan DVOŘÁK, Vilma BURŠÍKOVÁ a Petr KLAPETEK

Vydání

Coatings, MDPI, 2024, 2079-6412

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10300 1.3 Physical sciences

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.400 v roce 2022

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.3390/coatings14111439

Klíčová slova anglicky

ellipsometry; reflectometry; thin films; roughness; optical characterization

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 19. 11. 2024 12:00, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

The optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin films with correlated, differently rough boundaries is essential in optimizing their performance in various applications. A central aim of this study is to derive the general formulae necessary for the characterization of such films. The applicability of this theory is illustrated through the characterization of a polymer-like thin film deposited by plasma-enhanced chemical vapor deposition onto a silicon substrate with a randomly rough surface, focusing on the analysis of its rough boundaries over a wide range of spatial frequencies. The method is based on processing experimental data obtained using variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The transition layer is considered at the lower boundary of the polymer-like thin film. The spectral dependencies of the optical constants of the polymer-like thin film and the transition layer are determined using the Campi–Coriasso dispersion model. The reflectance data are processed using a combination of Rayleigh–Rice theory and scalar diffraction theory in the near-infrared and visible spectral ranges, while scalar diffraction theory is used for the processing of reflectance data within the ultraviolet range. Rayleigh–Rice theory alone is sufficient for the processing of the ellipsometric data across the entire spectral range. We accurately determine the thicknesses of the polymer-like thin film and the transition layer, as well as the roughness parameters of both boundaries, with the root mean square (rms) values cross-validated using atomic force microscopy. Notably, the rms values derived from optical measurements and atomic force microscopy show excellent agreement. These findings confirm the reliability of the optical method for the detailed characterization of thin films with differently rough boundaries, supporting the applicability of the proposed method in high-precision film analysis.

Návaznosti

GA23-06263S, projekt VaV

Název: Termofyzikální charakterizace tenkých vrstev

Investor: Grantová agentura ČR, Termofyzikální charakterizace tenkých vrstev

LM2023039, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan DVOŘÁK, Vilma BURŠÍKOVÁ a Petr KLAPETEK. Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries. Coatings. MDPI, 2024, roč. 14, č. 11, s. 1439-1458. ISSN 2079-6412. Dostupné z: https://dx.doi.org/10.3390/coatings14111439.

@article{2453159,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Dvořák, Jan and Buršíková, Vilma and Klapetek, Petr},
   article_number = {11},
   doi = {http://dx.doi.org/10.3390/coatings14111439},
   keywords = {ellipsometry; reflectometry; thin films; roughness; optical characterization},
   language = {eng},
   issn = {2079-6412},
   journal = {Coatings},
   title = {Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries},
   url = {https://www.mdpi.com/2079-6412/14/11/1439},
   volume = {14},
   year = {2024}
}

TY  - JOUR
ID  - 2453159
AU  - Ohlídal, Ivan - Vohánka, Jiří - Dvořák, Jan - Buršíková, Vilma - Klapetek, Petr
PY  - 2024
TI  - Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries
JF  - Coatings
VL  - 14
IS  - 11
SP  - 1439
EP  - 1439
PB  - MDPI
SN  - 20796412
KW  - ellipsometry
KW  - reflectometry
KW  - thin films
KW  - roughness
KW  - optical characterization
UR  - https://www.mdpi.com/2079-6412/14/11/1439
N2  - The optical characterization of non-absorbing, homogeneous, isotropic polymer-like thin films with correlated, differently rough boundaries is essential in optimizing their performance in various applications. A central aim of this study is to derive the general formulae necessary for the characterization of such films. The applicability of this theory is illustrated through the characterization of a polymer-like thin film deposited by plasma-enhanced chemical vapor deposition onto a silicon substrate with a randomly rough surface, focusing on the analysis of its rough boundaries over a wide range of spatial frequencies. The method is based on processing experimental data obtained using variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The transition layer is considered at the lower boundary of the polymer-like thin film. The spectral dependencies of the optical constants of the polymer-like thin film and the transition layer are determined using the Campi–Coriasso dispersion model. The reflectance data are processed using a combination of Rayleigh–Rice theory and scalar diffraction theory in the near-infrared and visible spectral ranges, while scalar diffraction theory is used for the processing of reflectance data within the ultraviolet range. Rayleigh–Rice theory alone is sufficient for the processing of the ellipsometric data across the entire spectral range. We accurately determine the thicknesses of the polymer-like thin film and the transition layer, as well as the roughness parameters of both boundaries, with the root mean square (rms) values cross-validated using atomic force microscopy. Notably, the rms values derived from optical measurements and atomic force microscopy show excellent agreement. These findings confirm the reliability of the optical method for the detailed characterization of thin films with differently rough boundaries, supporting the applicability of the proposed method in high-precision film analysis.
ER  -

OHLÍDAL, Ivan, Jiří VOHÁNKA, Jan DVOŘÁK, Vilma BURŠÍKOVÁ a Petr KLAPETEK. Determination of Optical and Structural Parameters of Thin Films with Differently Rough Boundaries. \textit{Coatings}. MDPI, 2024, roč.~14, č.~11, s.~1439-1458. ISSN~2079-6412. Dostupné z: https://dx.doi.org/10.3390/coatings14111439.

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