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@article{334911, author = {Franta, Daniel and Ohlídal, Ivan}, article_location = {USA}, article_number = {1}, keywords = {Inhomogeneous ZrO2-films; Optical characterization; Spectroscopic ellipsometry; Spectroscopic reflectometry}, language = {eng}, issn = {0142-2421}, journal = {Surface and Interface Analysis}, title = {Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry}, url = {http://hydra.physics.muni.cz/~franta/bib/SIA30_574.html}, volume = {30}, year = {2000} }
TY - JOUR ID - 334911 AU - Franta, Daniel - Ohlídal, Ivan PY - 2000 TI - Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry JF - Surface and Interface Analysis VL - 30 IS - 1 SP - 574-579 EP - 574-579 PB - John Wiley & Sons SN - 01422421 KW - Inhomogeneous ZrO2-films KW - Optical characterization KW - Spectroscopic ellipsometry KW - Spectroscopic reflectometry UR - http://hydra.physics.muni.cz/~franta/bib/SIA30_574.html N2 - In this paper results concerning the optical characterization of the inhomogeneous thin films of ZrO2 are presented. The optical characterization of these films is performed using the simultaneous interpretation of experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth inhomogeneity concerning their refractive indices. Further, it is shown that the ZrO2-films studied can be replaced by the four-layer system from the point of view of satisfactory fits of the experimental data. The values of the thicknesses and spectral dependences of the refractive indices of these four films are determined. Moreover, it is proved that the individual methods, i.e. VASE and especially NNSR, can not be separately used to characterize the ZrO2-films investigated. ER -
FRANTA, Daniel a Ivan OHLÍDAL. Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2000, roč.~30, č.~1, s.~574-579. ISSN~0142-2421.
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