Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition

BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Vladislav NAVRÁTIL, Jana PRYČKOVÁ, Deepak Prasad SUBEDI and Jan JANČA. Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition. In Proceedings of 13th Symposium on Application of Plasma Processes. Bratislava (Slovakia): Dept. of Plasma Physics & Inst. of Physics, Comenius University Bratislava (Slovakia), 2001, p. 77-78. ISBN 80-223-1573-7.

Basic information

• Original name: Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition
• Name in Czech: Modifikace tenkých DLC vrstev pomocí hexametyldisiloxanu
• Authors: BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Vladislav NAVRÁTIL (203 Czech Republic), Jana PRYČKOVÁ, Deepak Prasad SUBEDI (524 Nepal) and Jan JANČA (203 Czech Republic).
• Edition: Bratislava (Slovakia), Proceedings of 13th Symposium on Application of Plasma Processes, p. 77-78, 2001.
• Publisher: Dept. of Plasma Physics & Inst. of Physics, Comenius University Bratislava (Slovakia)

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Slovakia
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/01:00002843
• Organization unit: Faculty of Science
• ISBN: 80-223-1573-7
• Keywords in English: Plasma Physics; Thin Solid Films
• Tags: plasma physics, Thin solid films
• Tags: International impact, Reviewed

Abstract

The modification of some properties of diamond-like carbon thin films by addition of hexametyldisiloxan was studied.Especially mechanical properties (microhardness) were studied.

Abstract (in Czech)

V práci byly studovány vlastnosti diamantupodobných vrstev vv závislosti na množství hexametyldisiloxanu. zejména byly studovány mechanické vlastnosti vrstev (mikrotvrdost).

Links

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• ME 301, research and development project: Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev

Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings

• ME 367, research and development project: Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů

Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• OC 527.20, research and development project: Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů

Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague