SŤAHEL, Pavel, Petr SLÁDEK, Pere ROCA I CABARROCAS and Jiří ŠŤASTNÝ. Origin of the metastability of phosphorus or boron doped a-Si:H films. In Electronic Devices and Systems Y2K - Proceedings. první. Brno: ing. Zdeněk Novotný, CSc., 2000, p. 207-212. ISBN 80-214-1780-3.
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Basic information
Original name Origin of the metastability of phosphorus or boron doped a-Si:H films
Authors SŤAHEL, Pavel (203 Czech Republic), Petr SLÁDEK (203 Czech Republic, guarantor), Pere ROCA I CABARROCAS (250 France) and Jiří ŠŤASTNÝ (203 Czech Republic).
Edition první. Brno, Electronic Devices and Systems Y2K - Proceedings, p. 207-212, 2000.
Publisher ing. Zdeněk Novotný, CSc.
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10302 Condensed matter physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14410/00:00005993
Organization unit Faculty of Education
ISBN 80-214-1780-3
Keywords in English amorphous silicon; doping; metastability
Tags amorphous silicon, doping, metastability
Changed by Changed by: doc. RNDr. Petr Sládek, CSc., učo 1617. Changed: 20/5/2003 17:08.
Abstract
The effects of light-soaking on either phosphorus- or boron-doped a-Si:H films were studied as functions of the doping level and the temperature. The phosphorus-doped films present a remarkable stability although lightly phosphorus-doped ones show a decrease of their conductivity by five orders of magnitude when light-soaking is performed below 40 C. This effect is attributed to the formation of P-H complexes which are stable at low temperature only. Our results suggest that in both types of doped a-Si:H films the interaction of dopants with hydrogen plays an important role.
Links
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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