ZAJÍČKOVÁ, Lenka, Vratislav PEŘINA, Vilma BURŠÍKOVÁ, Anna MACKOVÁ a Jan JANČA. Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures. In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, s. 448-449. |
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@inproceedings{357861, author = {Zajíčková, Lenka and Peřina, Vratislav and Buršíková, Vilma and Macková, Anna and Janča, Jan}, address = {Miskolc - Lillafüred, Hungary}, booktitle = {Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases}, keywords = {Thin Films; PECVD; Hexamethyldisiloxane; RF discharge; RBS; ERD; FTIR; Polycarbonate}, language = {eng}, location = {Miskolc - Lillafüred, Hungary}, pages = {448-449}, publisher = {European Physical Society}, title = {Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures}, year = {2000} }
TY - JOUR ID - 357861 AU - Zajíčková, Lenka - Peřina, Vratislav - Buršíková, Vilma - Macková, Anna - Janča, Jan PY - 2000 TI - Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures PB - European Physical Society CY - Miskolc - Lillafüred, Hungary KW - Thin Films KW - PECVD KW - Hexamethyldisiloxane KW - RF discharge KW - RBS KW - ERD KW - FTIR KW - Polycarbonate N2 - The composition of films, deposited from hexamethyldisiloxane/oxygen mixtures was studied by FTIR transmittance measurements, Rutherford backscattering method (RBS) and elastic recoil detection (ERD). Films were characterized by the ellipsometry, the morphology of the film surfaces was studied by SEM and the mechanical properties of films were characterized by Vickers indentation technique. ER -
ZAJÍČKOVÁ, Lenka, Vratislav PEŘINA, Vilma BURŠÍKOVÁ, Anna MACKOVÁ a Jan JANČA. Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures. In \textit{Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases}. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, s.~448-449.
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