| MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK a I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. J. Phys. D: Appl. Phys. Velká Britanie: IOP Publishing Ltd, 2001, roč. 34, 10A, s. A188, 5 s. ISSN 0022-3727. |
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@article{362931,
author = {Mikulík, Petr and Jergel, M. and Baumbach, T. and Majková, E. and Pinčík, E. and Luby, Š. and Ortega, L. and Tucoulou, R. and Hudek, P. and Kostič, I.},
article_location = {Velká Britanie},
article_number = {10A},
keywords = {reflectivity; xrr; x-uv optics; gratings; w/si; x-ray},
language = {eng},
issn = {0022-3727},
journal = {J. Phys. D: Appl. Phys.},
title = {Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings},
url = {http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001},
volume = {34},
year = {2001}
}
TY - JOUR
ID - 362931
AU - Mikulík, Petr - Jergel, M. - Baumbach, T. - Majková, E. - Pinčík, E. - Luby, Š. - Ortega, L. - Tucoulou, R. - Hudek, P. - Kostič, I.
PY - 2001
TI - Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
JF - J. Phys. D: Appl. Phys.
VL - 34
IS - 10A
SP - A188
EP - A188
PB - IOP Publishing Ltd
SN - 00223727
KW - reflectivity
KW - xrr
KW - x-uv optics
KW - gratings
KW - w/si
KW - x-ray
UR - http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001
N2 - Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.
ER -
MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK a I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. \textit{J. Phys. D: Appl. Phys.}. Velká Britanie: IOP Publishing Ltd, 2001, roč.~34, 10A, s.~A188, 5 s. ISSN~0022-3727.
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