| HOLY, V., T. ROCH, J. STANGL and G. BAUER. Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires. Phys. Rev. B. USA: The American Phys. Society, 2001, vol. 63, No 20, p. 5318-5327. ISSN 0163-1829. |
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@article{385311,
author = {Holy, V. and Roch, T. and Stangl, J. and Bauer, G.},
article_location = {USA},
article_number = {20},
keywords = {KINETIC GROWTH INSTABILITIES; VICINAL SI(001) SURFACES; STEPPED INTERFACES; GE ISLANDS; MULTILAYERS; DIFFRACTION; SI(113); STRAIN},
language = {eng},
issn = {0163-1829},
journal = {Phys. Rev. B},
title = {Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires},
volume = {63},
year = {2001}
}
TY - JOUR
ID - 385311
AU - Holy, V. - Roch, T. - Stangl, J. - Bauer, G.
PY - 2001
TI - Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires
JF - Phys. Rev. B
VL - 63
IS - 20
SP - 5318
EP - 5318
PB - The American Phys. Society
SN - 01631829
KW - KINETIC GROWTH INSTABILITIES
KW - VICINAL SI(001) SURFACES
KW - STEPPED INTERFACES
KW - GE ISLANDS
KW - MULTILAYERS
KW - DIFFRACTION
KW - SI(113)
KW - STRAIN
N2 - The structure of self-organized quantum wires buried at the interfaces of a SiGe/Si multilayer is investigated by grazing incidence small-angle x-ray scattering. A nearly periodic distribution of wires, well described by a short-range ordering model, gives rise to intensity satellite maxima in reciprocal space. The shape of the wire cross section is determined from the heights of these intensity maxima, and the analysis reveals that the conventional step-bunching model is not sufficient to explain the wire shape.
ER -
HOLY, V., T. ROCH, J. STANGL and G. BAUER. Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires. \textit{Phys. Rev. B}. USA: The American Phys. Society, 2001, vol.~63, No~20, p.~5318-5327. ISSN~0163-1829.
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