BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ a Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. Materials Science and Engineering A. Elsevier Science, 2002, roč. 2002, č. 324, s. 251-254. ISSN 0921-5093. |
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@article{402313, author = {Buršíková, Vilma and Navrátil, Vladislav and Zajíčková, Lenka and Janča, Jan}, article_number = {324}, keywords = {Temperature dependence; mechanical properties; DLC; PECVD}, language = {eng}, issn = {0921-5093}, journal = {Materials Science and Engineering A}, title = {Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD}, volume = {2002}, year = {2002} }
TY - JOUR ID - 402313 AU - Buršíková, Vilma - Navrátil, Vladislav - Zajíčková, Lenka - Janča, Jan PY - 2002 TI - Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD JF - Materials Science and Engineering A VL - 2002 IS - 324 SP - 251 EP - 251 PB - Elsevier Science SN - 09215093 KW - Temperature dependence KW - mechanical properties KW - DLC KW - PECVD N2 - The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature. ER -
BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ a Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. \textit{Materials Science and Engineering A}. Elsevier Science, 2002, roč.~2002, č.~324, s.~251-254. ISSN~0921-5093.
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