Applications of atomic force microscopy for thin film boundary
measurements

J 2002

Applications of atomic force microscopy for thin film boundary measurements

KLAPETEK, Petr, Ivan OHLÍDAL a Daniel FRANTA

Základní údaje

Originální název

Applications of atomic force microscopy for thin film boundary measurements

Autoři

KLAPETEK, Petr (203 Česká republika), Ivan OHLÍDAL (203 Česká republika, garant) a Daniel FRANTA (203 Česká republika)

Vydání

Jemná mechanika a optika, Přerov, Physical Institute, ASCR, 2002, 0447-6441

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Kód RIV

RIV/00216224:14310/02:00006295

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Roughness; Atomic Force Microscopy

Štítky

atomic force microscopy, Roughness

Změněno: 25. 12. 2003 01:03, Mgr. Daniel Franta, Ph.D.

Anotace

V originále

In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface reconstruction algorithm effects on improving the values of the statistical parameters are presented too.

Návaznosti

GA101/01/1104, projekt VaV

Název: Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie

Investor: Grantová agentura ČR, Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie

GA202/01/1110, projekt VaV

Název: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Grantová agentura ČR, Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Citovat

KLAPETEK, Petr, Ivan OHLÍDAL a Daniel FRANTA. Applications of atomic force microscopy for thin film boundary measurements. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2002, roč. 47, 6-7, s. 195-199. ISSN 0447-6441.

@article{404728,
   author = {Klapetek, Petr and Ohlídal, Ivan and Franta, Daniel},
   article_location = {Přerov},
   article_number = {6-7},
   keywords = {Roughness; Atomic Force Microscopy},
   language = {eng},
   issn = {0447-6441},
   journal = {Jemná mechanika a optika},
   title = {Applications of atomic force microscopy for thin film boundary measurements},
   url = {http://hydra.physics.muni.cz/~franta/bib/JMO2002_195.html},
   volume = {47},
   year = {2002}
}

TY  - JOUR
ID  - 404728
AU  - Klapetek, Petr - Ohlídal, Ivan - Franta, Daniel
PY  - 2002
TI  - Applications of atomic force microscopy for thin film boundary measurements
JF  - Jemná mechanika a optika
VL  - 47
IS  - 6-7
SP  - 195-199
EP  - 195-199
PB  - Physical Institute, ASCR
SN  - 04476441
KW  - Roughness
KW  - Atomic Force Microscopy
UR  - http://hydra.physics.muni.cz/~franta/bib/JMO2002_195.html
N2  - In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface reconstruction algorithm effects on improving the values of the statistical parameters are presented too.
ER  -

KLAPETEK, Petr, Ivan OHLÍDAL a Daniel FRANTA. Applications of atomic force microscopy for thin film boundary measurements. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2002, roč.~47, 6-7, s.~195-199. ISSN~0447-6441.

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