Applications of atomic force microscopy for thin film boundary measurements

KLAPETEK, Petr, Ivan OHLÍDAL and Daniel FRANTA. Applications of atomic force microscopy for thin film boundary measurements. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2002, vol. 47, 6-7, p. 195-199. ISSN 0447-6441.

Basic information

• Original name: Applications of atomic force microscopy for thin film boundary measurements
• Authors: KLAPETEK, Petr (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic, guarantor) and Daniel FRANTA (203 Czech Republic).
• Edition: Jemná mechanika a optika, Přerov, Physical Institute, ASCR, 2002, 0447-6441.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/02:00006295
• Organization unit: Faculty of Science
• Keywords in English: Roughness; Atomic Force Microscopy
• Tags: atomic force microscopy, Roughness

Abstract

In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface reconstruction algorithm effects on improving the values of the statistical parameters are presented too.

Links

• GA101/01/1104, research and development project: Name: Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie

Investor: Czech Science Foundation, Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry

• GA202/01/1110, research and development project: Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method