ELIÁŠ, Marek, Vít KUDRLE, Jan JANČA a Vlastimil BROŽEK. Plasmachemical nitridation of boron precursors. Czech. J. Phys. Praha: IOP AS CR, 2002, roč. 52, č. 52, s. 850-856. ISSN 0011-4626. |
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@article{483185, author = {Eliáš, Marek and Kudrle, Vít and Janča, Jan and Brožek, Vlastimil}, article_location = {Praha}, article_number = {52}, keywords = {boron nitride; plasma chemistry}, language = {eng}, issn = {0011-4626}, journal = {Czech. J. Phys.}, title = {Plasmachemical nitridation of boron precursors}, volume = {52}, year = {2002} }
TY - JOUR ID - 483185 AU - Eliáš, Marek - Kudrle, Vít - Janča, Jan - Brožek, Vlastimil PY - 2002 TI - Plasmachemical nitridation of boron precursors JF - Czech. J. Phys. VL - 52 IS - 52 SP - 850 EP - 850 PB - IOP AS CR SN - 00114626 KW - boron nitride KW - plasma chemistry N2 - We carried out the plasmachemical nitridation of boron precursors ER -
ELIÁŠ, Marek, Vít KUDRLE, Jan JANČA a Vlastimil BROŽEK. Plasmachemical nitridation of boron precursors. \textit{Czech. J. Phys.}. Praha: IOP AS CR, 2002, roč.~52, č.~52, s.~850-856. ISSN~0011-4626.
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