| ELIÁŠ, Marek, Vít KUDRLE, Jan JANČA a Vlastimil BROŽEK. Plasmachemical nitridation of boron precursors. Czech. J. Phys. Praha: IOP AS CR, 2002, roč. 52, č. 52, s. 850-856. ISSN 0011-4626. |
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@article{483185,
author = {Eliáš, Marek and Kudrle, Vít and Janča, Jan and Brožek, Vlastimil},
article_location = {Praha},
article_number = {52},
keywords = {boron nitride; plasma chemistry},
language = {eng},
issn = {0011-4626},
journal = {Czech. J. Phys.},
title = {Plasmachemical nitridation of boron precursors},
volume = {52},
year = {2002}
}
TY - JOUR
ID - 483185
AU - Eliáš, Marek - Kudrle, Vít - Janča, Jan - Brožek, Vlastimil
PY - 2002
TI - Plasmachemical nitridation of boron precursors
JF - Czech. J. Phys.
VL - 52
IS - 52
SP - 850
EP - 850
PB - IOP AS CR
SN - 00114626
KW - boron nitride
KW - plasma chemistry
N2 - We carried out the plasmachemical nitridation of boron precursors
ER -
ELIÁŠ, Marek, Vít KUDRLE, Jan JANČA a Vlastimil BROŽEK. Plasmachemical nitridation of boron precursors. \textit{Czech. J. Phys.}. Praha: IOP AS CR, 2002, roč.~52, č.~52, s.~850-856. ISSN~0011-4626.
|
