New Dispersion Model of the Optical Constants of the DLC Films

J 2003

New Dispersion Model of the Optical Constants of the DLC Films

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL

Základní údaje

Originální název

New Dispersion Model of the Optical Constants of the DLC Films

Autoři

FRANTA, Daniel (203 Česká republika, garant), Lenka ZAJÍČKOVÁ (203 Česká republika), Vilma BURŠÍKOVÁ (203 Česká republika) a Ivan OHLÍDAL (203 Česká republika)

Vydání

Acta Physica Slovaca, Bratislava, Institute of Physics, SAS, 2003, 0323-0465

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Slovensko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 0.579

Kód RIV

RIV/00216224:14310/03:00008252

Organizační jednotka

Přírodovědecká fakulta

UT WoS

000186031700003

Klíčová slova anglicky

Diamond-like Carbon; Ellipsometry; Dispersion Model

Štítky

Diamond-like Carbon, Dispersion model, ellipsometry

Změněno: 28. 11. 2004 18:18, Mgr. Daniel Franta, Ph.D.

Anotace

V originále

In this paper a new dispersion model of the optical constants of amorphous solids enabled us to perform an efficient parameterization of the optical constants of diamond like carbon (DLC) thin films. The model was based on the mathematical modeling of the density of electronic states (DOS) corresponding to both the valence and conduction bands. Moreover, the existence of the sigma and pi electronic states was taken into account, i.e. two valence and two conduction bands were supposed. The imaginary and real parts of the dielectric function were then calculated by the numerical convolution of the DOS and using a corresponding Kramers-Kronig relation, respectively. According to the model the DOS as well as the optical constants were calculated from ellipsometric measurements in the range 240-830 nm and estimated even outside this range. From the parameters of the model we evaluated also the ratio of pi-to-sigma electrons and consequently the sp3-to-sp2 ratio using a known hydrogen atomic fraction. The optical constants of DLC films with addition of SiOx were determined and compared with DLC too.

Návaznosti

GA202/01/1110, projekt VaV

Název: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Grantová agentura ČR, Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

ME 489, projekt VaV

Název: Studium reaktivity organosilikonových monomerů v depozičním plazmatu

MSM 143100003, záměr

Název: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. New Dispersion Model of the Optical Constants of the DLC Films. Acta Physica Slovaca. Bratislava: Institute of Physics, SAS, 2003, roč. 53, č. 5, s. 373-384. ISSN 0323-0465.

@article{489710,
   author = {Franta, Daniel and Zajíčková, Lenka and Buršíková, Vilma and Ohlídal, Ivan},
   article_location = {Bratislava},
   article_number = {5},
   keywords = {Diamond-like Carbon; Ellipsometry; Dispersion Model},
   language = {eng},
   issn = {0323-0465},
   journal = {Acta Physica Slovaca},
   title = {New Dispersion Model of the Optical Constants of the DLC Films},
   url = {http://hydra.physics.muni.cz/~franta/bib/APS53_373.html},
   volume = {53},
   year = {2003}
}

TY  - JOUR
ID  - 489710
AU  - Franta, Daniel - Zajíčková, Lenka - Buršíková, Vilma - Ohlídal, Ivan
PY  - 2003
TI  - New Dispersion Model of the Optical Constants of the DLC Films
JF  - Acta Physica Slovaca
VL  - 53
IS  - 5
SP  - 373-384
EP  - 373-384
PB  - Institute of Physics, SAS
SN  - 03230465
KW  - Diamond-like Carbon
KW  - Ellipsometry
KW  - Dispersion Model
UR  - http://hydra.physics.muni.cz/~franta/bib/APS53_373.html
N2  - In this paper a new dispersion model of the optical constants of amorphous solids enabled us to perform an efficient parameterization of the optical constants of diamond like carbon (DLC) thin films. The model was based on the mathematical modeling of the density of electronic states (DOS) corresponding to both the valence and conduction bands. Moreover, the existence of the sigma and pi electronic states was taken into account, i.e. two valence and two conduction bands were supposed. The imaginary and real parts of the dielectric function were then calculated by the numerical convolution of the DOS and using a corresponding Kramers-Kronig relation, respectively. According to the model the DOS as well as the optical constants were calculated from ellipsometric measurements in the range 240-830 nm and estimated even outside this range. From the parameters of the model we evaluated also the ratio of pi-to-sigma electrons and consequently the sp3-to-sp2 ratio using a known hydrogen atomic fraction. The optical constants of DLC films with addition of SiOx were determined and compared with DLC too.
ER  -

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. New Dispersion Model of the Optical Constants of the DLC Films. \textit{Acta Physica Slovaca}. Bratislava: Institute of Physics, SAS, 2003, roč.~53, č.~5, s.~373-384. ISSN~0323-0465.

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