DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ and Jan JANČA. Mode transition in r.f. capacitive discharge in hydrogen. In Proceedings of 26th ICPIG. Greifswald: Greifswald, 2003, p. 1-2.
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Basic information
Original name Mode transition in r.f. capacitive discharge in hydrogen
Authors DVOŘÁK, Pavel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
Edition Greifswald, Proceedings of 26th ICPIG, p. 1-2, 2 pp. 2003.
Publisher Greifswald
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Germany
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14330/03:00009028
Organization unit Faculty of Informatics
Keywords in English rf capacitive discharges; mode transition; hydrogen
Tags Hydrogen, mode transition, rf capacitive discharges
Changed by Changed by: RNDr. JUDr. Vladimír Šmíd, CSc., učo 1084. Changed: 29/5/2004 18:37.
Abstract
We have studied low-pressure capacitively coupled rf discharges in hydrogen. Two different discharge modes were observed. These two modes differ significantly in the plasma potential and in the nature of sheaths. For diagnostic purposes the Plasma Process Monitor, optical emission spectroscopy and Lamgmuir probe were used.
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MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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